Document last revised 16/07/21
Contents
2. ASM Single-Wafer Reactor for Silicon Deposition
4. Parallel Plate Plasma Reactor
Three input 'q1' files are presented here. These have been constructed for the simulation of an ASM single-wafer reactor for silicon deposition, a tungsten reactor and a parallel plate plasma reactor, also for silicon deposition. All geometries are axisymmetric and laminar, steady-state conditions are assumed. Although these examples are based on real cases it should be noted that some of the parameters are selected for demonstration purposes. The 'q1' files are also provided in the code installation as library cases.
The inlet flow is 88.7% nitrogen and 11.3% silane by mass, at a temperature of 290K. The susceptor is held at a temperature of 900K and all outside walls are cooled to a temperature of 290K. Five gas-phase and five surface reactions are activated.
TALK=T;RUN( 1, 1)
************************************************************
Q1 created by VDI menu, Version 2013, Date 23/03/13
CPVNAM=VDI;SPPNAM=CVD
************************************************************
Echo DISPLAY / USE settings
DISPLAY
This q1 file simulates an ASM single wafer chemical vapour
deposition reactor using Wilke diffusion; the reactor is
axisymmetric and the geometry was provided by TU Delft.
Laminar, steady-state flow is assumed.
------> Y
|
|
| Z
V
| INLET FLOW |**********************|
C| PLUG PROFILE |**********************|
E|||||||||||||||||||||||**********************|
N|VVVVVVVVVVVVVVVVVVVVV|***** BLOCKAGE *******|W
T| |**********************|A
R| | |**********************|L
E| V | ___________________|L
| |**| |
L| |**| |
I| | |**| |
N| V |**| |
E| |__| |
| |
| | |W
C| V |A
E| --> --> | |L
N| V |L
T| |
R| |
E|___________________________ |
|****** SUSCEPTOR **********| | |
L|***************************|_______ V |
I|***********************************| |
N|***********************************| |W
E|***********************************| |A
|***********************************| | |L
|************ BLOCKAGE *************| V |L
|***********************************| |
|***********************************| |
|***********************************| |
|***********************************|PRESSURE|
|***********************************| OUTLET |
ENDDIS
************************************************************
IRUNN = 1 ;LIBREF = 100
************************************************************
Group 1. Run Title
TEXT(ASM Single Wafer Si Reactor - Wilke:D100)
************************************************************
Group 2. Transience
STEADY = T
************************************************************
Groups 3, 4, 5 Grid Information
* Overall number of cells, RSET(M,NX,NY,NZ,tolerance)
RSET(M,1,18,26,1.0E-05)
* Cylindrical-polar grid
CARTES=F
************************************************************
Group 6. Body-Fitted coordinates
************************************************************
Group 7. Variables: STOREd,SOLVEd,NAMEd
* Non-default variable names
NAME(16)=S116 ;NAME(17)=S140
NAME(18)=S142 ;NAME(19)=S145
NAME(20)=S158 ;NAME(21)=S147
NAME(22)=S80 ;NAME(141)=ENUL
NAME(142)=BLOK ;NAME(143)=PRPS
NAME(144)=DEPO ;NAME(145)=SPHT
NAME(146)=CNDT ;NAME(147)=EMIS
NAME(148)=VPOR ;NAME(149)=RHO1
NAME(150) =TEM1
* Solved variables list
SOLVE(P1,V1,W1,S140,S142,S145,S158,S147)
SOLVE(S80,TEM1)
* Stored variables list
STORE(RHO1,VPOR,EMIS,CNDT,SPHT,DEPO,PRPS,BLOK)
STORE(ENUL,S116)
* Additional solver options
SOLUTN(P1,Y,Y,Y,N,N,N)
SOLUTN(S140,Y,Y,Y,N,N,Y)
SOLUTN(S142,Y,Y,Y,N,N,Y)
SOLUTN(S145,Y,Y,Y,N,N,Y)
SOLUTN(S158,Y,Y,Y,N,N,Y)
SOLUTN(S147,Y,Y,Y,N,N,Y)
SOLUTN(S80,Y,Y,Y,N,N,Y)
SOLUTN(TEM1,Y,Y,Y,N,N,Y)
IVARBK = -1 ;ISOLBK = 1
************************************************************
Group 8. Terms & Devices
DIFCUT =0.
NEWRH1 = T
NEWENL = T
UDIFNE = T
USOURC = T
ISOLX = 0 ;ISOLY = 0 ;ISOLZ = 0
************************************************************
Group 9. Properties
PRESS0 =133.
* Domain material index is 70 signifying:
* NOTSET
SETPRPS(1, 70,Q1)
ENUT =0.
DVO1DT =1.
PRNDTL(S140)=-GRND8 ;PRNDTL(S142)=-GRND8
PRNDTL(S145)=-GRND8 ;PRNDTL(S158)=-GRND8
PRNDTL(S147)=-GRND8 ;PRNDTL(S80)=-GRND8
PRNDTL(TEM1)=-GRND8
PRLH1A =0. ;PRLH1B =0.
PRLH1C =0.
* List of user-defined materials to be read by EARTH
MATFLG=T;IMAT=1
* Name
*Ind. Dens. Viscos. Spec.heat Conduct. Expans. Compr.
* >CVD_GAS>
70 GRND8 GRND8 GRND8 GRND8 1.000 0.000
* constants for GRND option no 1
0. 0.
* constants for GRND option no 2
0. 0.
* constants for GRND option no 3
0. 0.
* constants for GRND option no 4
0. 0.
************************************************************
Group 10.Inter-Phase Transfer Processes
************************************************************
Group 11.Initialise Var/Porosity Fields
FIINIT(P1)=0. ;FIINIT(V1)=0.
FIINIT(W1)=0. ;FIINIT(S116)=0.887
FIINIT(S140)=0.113 ;FIINIT(S142)=1.001E-10
FIINIT(S145)=1.001E-10 ;FIINIT(S158)=1.001E-10
FIINIT(S147)=1.001E-10 ;FIINIT(S80)=1.001E-10
FIINIT(ENUL)=1.001E-10 ;FIINIT(BLOK)=1.
FIINIT(PRPS)=-1. ;FIINIT(DEPO)=1.001E-10
FIINIT(SPHT)=1.001E-10 ;FIINIT(CNDT)=1.001E-10
FIINIT(EMIS)=0. ;FIINIT(VPOR)=1.
FIINIT(RHO1)=1.001E-10 ;FIINIT(TEM1)=290.
No PATCHes used for this Group
INIADD = F
************************************************************
Group 12. Convection and diffusion adjustments
No PATCHes used for this Group
************************************************************
Group 13. Boundary & Special Sources
PATCH(CHEM, VOLUME, 0, 0, 0, 0, 0, 0, 1, 1)
COVAL(CHEM, S140, GRND1, GRND1)
COVAL(CHEM, S142, GRND1, GRND1)
COVAL(CHEM, S145, GRND1, GRND1)
COVAL(CHEM, S158, GRND1, GRND1)
COVAL(CHEM, S147, GRND1, GRND1)
COVAL(CHEM, S80, GRND1, GRND1)
COVAL(CHEM, TEM1, GRND1, GRND1)
PATCH(RELT, PHASEM, 0, 0, 0, 0, 0, 0, 1, 1)
COVAL(RELT, S140, GRND1, SAME)
COVAL(RELT, S142, GRND1, SAME)
COVAL(RELT, S145, GRND1, SAME)
COVAL(RELT, S158, GRND1, SAME)
COVAL(RELT, S147, GRND1, SAME)
COVAL(RELT, S80, GRND1, SAME)
EGWF = T
************************************************************
Group 14. Downstream Pressure For PARAB
************************************************************
Group 15. Terminate Sweeps
LSWEEP = 100
RESFAC =1.0E-03
************************************************************
Group 16. Terminate Iterations
************************************************************
Group 17. Relaxation
RELAX(P1 ,LINRLX,0.8 )
RELAX(V1 ,FALSDT,2.0E-03 )
RELAX(W1 ,FALSDT,2.0E-03 )
RELAX(S140,FALSDT,1. )
RELAX(S142,FALSDT,1. )
RELAX(S145,FALSDT,1. )
RELAX(S158,FALSDT,1. )
RELAX(S147,FALSDT,1. )
RELAX(S80 ,FALSDT,1. )
RELAX(TEM1,LINRLX,0.3 )
************************************************************
Group 18. Limits
VARMAX(S116)=1. ;VARMIN(S116)=1.0E-20
VARMAX(S140)=1. ;VARMIN(S140)=1.0E-20
VARMAX(S142)=1. ;VARMIN(S142)=1.0E-20
VARMAX(S145)=1. ;VARMIN(S145)=1.0E-20
VARMAX(S158)=1. ;VARMIN(S158)=1.0E-20
VARMAX(S147)=1. ;VARMIN(S147)=1.0E-20
VARMAX(S80)=1. ;VARMIN(S80)=1.0E-20
VARMAX(TEM1)=2000. ;VARMIN(TEM1)=200.
************************************************************
Group 19. EARTH Calls To GROUND Station
NAMGRD =CVD
S2SR = T
CSG10 ='q1'
SPEDAT(SET,CVD,MCDOPT,I,2)
SPEDAT(SET,CVD,BINOPT,I,4)
SPEDAT(SET,CVD,MCPROP,I,3)
SPEDAT(SET,CVD,CHMRLX,R,0.5)
SPEDAT(SET,CVD,NGREAC,I,5)
SPEDAT(SET,CVD,GREAC(1),I,6)
SPEDAT(SET,CVD,GREAC(2),I,7)
SPEDAT(SET,CVD,GREAC(3),I,16)
SPEDAT(SET,CVD,GREAC(4),I,9)
SPEDAT(SET,CVD,GREAC(5),I,10)
SPEDAT(SET,CVD,NSREAC,I,5)
SPEDAT(SET,CVD,SREAC(1),I,11)
SPEDAT(SET,CVD,SREAC(2),I,12)
SPEDAT(SET,CVD,SREAC(3),I,13)
SPEDAT(SET,CVD,SREAC(4),I,14)
SPEDAT(SET,CVD,SREAC(5),I,15)
SPEDAT(SET,CVD,RADCVD,L,T)
SPEDAT(SET,S2SR,XMIR,L,F)
SPEDAT(SET,S2SR,YMIR,L,F)
SPEDAT(SET,S2SR,ZMIR,L,F)
SPEDAT(SET,S2SR,AXIBFC,L,F)
SPEDAT(SET,S2SR,FINE3D,L,F)
SPEDAT(SET,S2SR,VFNORM,L,T)
SPEDAT(SET,S2SR,NUMRAY,I,1)
************************************************************
Group 20. Preliminary Printout
************************************************************
Group 21. Print-out of Variables
************************************************************
Group 22. Monitor Print-Out
IXMON = 1 ;IYMON = 5 ;IZMON = 12
NPRMON = 100000
NPRMNT = 1
TSTSWP = -1
************************************************************
Group 23.Field Print-Out & Plot Control
NPRINT = 100000
ISWPRF = 1 ;ISWPRL = 100000
No PATCHes used for this Group
************************************************************
Group 24. Dumps For Restarts
GVIEW(P,-1.,0.,0.)
GVIEW(UP,0.,1.,0.)
GVIEW(NEARPLANE,6.8E-04)
GVIEW(VDIS,0.191823)
GVIEW(CENTRE,1.049983E-03,0.105,0.17)
> DOM, SIZE, 1.000000E-02, 2.100000E-01, 3.400000E-01
> DOM, MONIT, 0.000000E+00, 4.500000E-02, 1.809232E-01
> DOM, SCALE, 1.000000E+00, 1.000000E+00, 1.000000E+00
> DOM, INCREMENT, 1.000000E-02, 1.000000E-02, 1.000000E-02
> GRID, RSET_X_1, 1, 1.000000E+00
> GRID, RSET_Y_1, 10, 1.000000E+00
> GRID, RSET_Y_2, 1, 1.000000E+00
> GRID, RSET_Y_3, 1, 1.000000E+00
> GRID, RSET_Y_4, 2, 1.000000E+00
> GRID, RSET_Y_5, 4, 1.000000E+00
> GRID, RSET_Z_1, 5, 1.000000E+00
> GRID, RSET_Z_2, 2, 1.000000E+00
> GRID, RSET_Z_3, 12,-1.200000E+00
> GRID, RSET_Z_4, 1, 1.000000E+00
> GRID, RSET_Z_5, 6,-9.000000E-01
> DOM, T_AMBIENT, 0.000000E+00
> OBJ, NAME, WAL1
> OBJ, POSITION, 0.000000E+00, 0.000000E+00, 2.350000E-01
> OBJ, SIZE, 1.000000E-02, 1.200000E-01, 5.000000E-03
> OBJ, GEOMETRY, polcu7
> OBJ, TYPE, BLOCKAGE
> OBJ, MATERIAL, 111,STEEL at 27 deg c (C = 1%)
> OBJ, FIXED_TMP, 0. ,900.
> OBJ, INI_BLOK, 2.
> OBJ, SUF_REAC_L, YES
> OBJ, BATCH_F_L, 1.
> OBJ, NAME, WAL2
> OBJ, POSITION, 0.000000E+00, 1.000000E-01, 0.000000E+00
> OBJ, SIZE, 1.000000E-02, 1.100000E-01, 1.000000E-01
> OBJ, GEOMETRY, polcu7
> OBJ, TYPE, BLOCKAGE
> OBJ, MATERIAL, 198,Solid with smooth-wall friction
> OBJ, EMISSIV_W, 1.
> OBJ, EMISSIV_E, 1.
> OBJ, SURF_TEMP_S, 0. ,290.
> OBJ, EMISSIV_S, 1.
> OBJ, EMISSIV_N, 1.
> OBJ, EMISSIV_L, 1.
> OBJ, SURF_TEMP_H, 0. ,290.
> OBJ, EMISSIV_H, 1.
> OBJ, NAME, WAL3
> OBJ, POSITION, 0.000000E+00, 1.000000E-01, 1.000000E-01
> OBJ, SIZE, 1.000000E-02, 5.000000E-03, 4.000000E-02
> OBJ, GEOMETRY, polcu8
> OBJ, TYPE, BLOCKAGE
> OBJ, MATERIAL, 111,STEEL at 27 deg c (C = 1%)
> OBJ, INI_BLOK, 4.
> OBJ, NAME, WAL4
> OBJ, POSITION, 0.000000E+00, 0.000000E+00, 2.400000E-01
> OBJ, SIZE, 1.000000E-02, 1.550000E-01, 1.000000E-01
> OBJ, GEOMETRY, polcu7
> OBJ, TYPE, BLOCKAGE
> OBJ, MATERIAL, 198,Solid with smooth-wall friction
> OBJ, EMISSIV_W, 1.
> OBJ, EMISSIV_E, 1.
> OBJ, EMISSIV_S, 1.
> OBJ, SURF_TEMP_N, 0. ,290.
> OBJ, EMISSIV_N, 1.
> OBJ, EMISSIV_L, 1.
> OBJ, EMISSIV_H, 1.
> OBJ, NAME, INLET
> OBJ, POSITION, 0.000000E+00, 0.000000E+00, 0.000000E+00
> OBJ, SIZE, 1.000000E-02, 1.000000E-01, 0.000000E+00
> OBJ, GEOMETRY, polcu5t
> OBJ, TYPE, INLET
> OBJ, DENSITY, 1.572E-03
> OBJ, VELOCITY, 0. ,0. ,1.345
> OBJ, TEMPERATURE, 290.
> OBJ, INLET_S140, 0.113
> OBJ, NAME, OUT
> OBJ, POSITION, 0.000000E+00, 1.550000E-01, 3.400000E-01
> OBJ, SIZE, 1.000000E-02, 5.500000E-02, 0.000000E+00
> OBJ, GEOMETRY, polcubet
> OBJ, TYPE, OUTLET
> OBJ, PRESSURE, 0.
> OBJ, TEMPERATURE, SAME
> OBJ, COEFFICIENT, 1000.
> OBJ, VELOCITY, 0. , SAME , SAME
> OBJ, OUTLET_S140, SAME
> OBJ, OUTLET_S142, SAME
> OBJ, OUTLET_S145, SAME
> OBJ, OUTLET_S158, SAME
> OBJ, OUTLET_S147, SAME
> OBJ, OUTLET_S80, SAME
> OBJ, NAME, DOME
> OBJ, POSITION, 0.000000E+00, 1.200000E-01, 2.400000E-01
> OBJ, SIZE, 1.000000E-02, 3.500000E-02, 0.000000E+00
> OBJ, GEOMETRY, polcu2
> OBJ, TYPE, PLATE
> OBJ, POROSITY, 0.
> OBJ, SIDE, LOW
> OBJ, SURF_TEMP_L, 0. ,290.
> OBJ, EMI_LOW, 1.
> OBJ, NAME, WAND2
> OBJ, POSITION, 0.000000E+00, 2.100000E-01, 1.000000E-01
> OBJ, SIZE, 1.000000E-02, 0.000000E+00, 2.400000E-01
> OBJ, GEOMETRY, polcu2
> OBJ, TYPE, PLATE
> OBJ, SURF_TEMP, 0. ,290.
> OBJ, EMISSIVITY, 1.
> OBJ, NAME, @RI001
> OBJ, POSITION, 0.000000E+00, 0.000000E+00, 0.000000E+00
> OBJ, SIZE, 1.000000E-02, 1.000000E-01, 0.000000E+00
> OBJ, GEOMETRY, polcusrf
> OBJ, TYPE, RAD_SURF
> OBJ, SETTING, AUTO
> OBJ, SURF_TEMP, 290.
> OBJ, OPTIC_INDX, 111.
> OBJ, OPTIC_TEMP, 290.
> OBJ, NAME, @RI002
> OBJ, POSITION, 0.000000E+00, 1.000000E-01, 0.000000E+00
> OBJ, SIZE, 1.000000E-02, 0.000000E+00, 1.000000E-01
> OBJ, GEOMETRY, polcusrf
> OBJ, TYPE, RAD_SURF
> OBJ, SETTING, AUTO
> OBJ, SURF_TEMP, 290.
> OBJ, OPTIC_INDX, 111.
> OBJ, OPTIC_TEMP, 290.
> OBJ, NAME, @RI003
> OBJ, POSITION, 0.000000E+00, 1.000000E-01, 1.000000E-01
> OBJ, SIZE, 1.000000E-02, 0.000000E+00, 4.000000E-02
> OBJ, GEOMETRY, polcusrf
> OBJ, TYPE, RAD_SURF
> OBJ, OBJECT-SIDE, HIGH
> OBJ, SETTING, AUTO
> OBJ, TEMP_COEF, GRND1
> OBJ, OPTIC_INDX, 111.
> OBJ, OPTIC_TEMP, 300.
> OBJ, NAME, @RI004
> OBJ, POSITION, 0.000000E+00, 1.000000E-01, 1.400000E-01
> OBJ, SIZE, 1.000000E-02, 5.000000E-03, 0.000000E+00
> OBJ, GEOMETRY, polcusrf
> OBJ, TYPE, RAD_SURF
> OBJ, SETTING, AUTO
> OBJ, TEMP_COEF, GRND1
> OBJ, OPTIC_INDX, 111.
> OBJ, OPTIC_TEMP, 300.
> OBJ, NAME, @RI005
> OBJ, POSITION, 0.000000E+00, 1.050000E-01, 1.000000E-01
> OBJ, SIZE, 1.000000E-02, 0.000000E+00, 4.000000E-02
> OBJ, GEOMETRY, polcusrf
> OBJ, TYPE, RAD_SURF
> OBJ, SETTING, AUTO
> OBJ, TEMP_COEF, GRND1
> OBJ, OPTIC_INDX, 111.
> OBJ, OPTIC_TEMP, 300.
> OBJ, NAME, @RI006
> OBJ, POSITION, 0.000000E+00, 1.050000E-01, 1.000000E-01
> OBJ, SIZE, 1.000000E-02, 1.050000E-01, 0.000000E+00
> OBJ, GEOMETRY, polcusrf
> OBJ, TYPE, RAD_SURF
> OBJ, OBJECT-SIDE, HIGH
> OBJ, SETTING, AUTO
> OBJ, SURF_TEMP, 290.
> OBJ, OPTIC_INDX, 111.
> OBJ, OPTIC_TEMP, 290.
> OBJ, NAME, @RI007
> OBJ, POSITION, 0.000000E+00, 2.100000E-01, 1.000000E-01
> OBJ, SIZE, 1.000000E-02, 0.000000E+00, 2.400000E-01
> OBJ, GEOMETRY, polcusrf
> OBJ, TYPE, RAD_SURF
> OBJ, SETTING, AUTO
> OBJ, SURF_TEMP, 290.
> OBJ, OPTIC_INDX, 111.
> OBJ, OPTIC_TEMP, 290.
> OBJ, NAME, @RI008
> OBJ, POSITION, 0.000000E+00, 1.550000E-01, 3.400000E-01
> OBJ, SIZE, 1.000000E-02, 5.500000E-02, 0.000000E+00
> OBJ, GEOMETRY, polcusrf
> OBJ, TYPE, RAD_SURF
> OBJ, SETTING, AUTO
> OBJ, SURF_TEMP, 290.
> OBJ, OPTIC_INDX, 111.
> OBJ, OPTIC_TEMP, 290.
> OBJ, NAME, @RI009
> OBJ, POSITION, 0.000000E+00, 1.550000E-01, 2.400000E-01
> OBJ, SIZE, 1.000000E-02, 0.000000E+00, 1.000000E-01
> OBJ, GEOMETRY, polcusrf
> OBJ, TYPE, RAD_SURF
> OBJ, OBJECT-SIDE, HIGH
> OBJ, SETTING, AUTO
> OBJ, SURF_TEMP, 290.
> OBJ, OPTIC_INDX, 111.
> OBJ, OPTIC_TEMP, 290.
> OBJ, NAME, @RI010
> OBJ, POSITION, 0.000000E+00, 1.200000E-01, 2.400000E-01
> OBJ, SIZE, 1.000000E-02, 3.500000E-02, 0.000000E+00
> OBJ, GEOMETRY, polcusrf
> OBJ, TYPE, RAD_SURF
> OBJ, SETTING, AUTO
> OBJ, SURF_TEMP, 290.
> OBJ, OPTIC_INDX, 111.
> OBJ, OPTIC_TEMP, 290.
> OBJ, NAME, @RI011
> OBJ, POSITION, 0.000000E+00, 1.200000E-01, 2.350000E-01
> OBJ, SIZE, 1.000000E-02, 0.000000E+00, 5.000000E-03
> OBJ, GEOMETRY, polcusrf
> OBJ, TYPE, RAD_SURF
> OBJ, SETTING, AUTO
> OBJ, TEMP_COEF, GRND1
> OBJ, OPTIC_INDX, 111.
> OBJ, OPTIC_TEMP, 900.
> OBJ, NAME, @RI012
> OBJ, POSITION, 0.000000E+00, 0.000000E+00, 2.350000E-01
> OBJ, SIZE, 1.000000E-02, 1.200000E-01, 0.000000E+00
> OBJ, GEOMETRY, polcusrf
> OBJ, TYPE, RAD_SURF
> OBJ, OBJECT-SIDE, HIGH
> OBJ, SETTING, AUTO
> OBJ, TEMP_COEF, GRND1
> OBJ, OPTIC_INDX, 111.
> OBJ, OPTIC_TEMP, 900.
************************************************************
STOP
The tungsten reactor has a showerhead inlet, the details of which are not modelled; instead a uniform inlet is specified. The inlet flow is 6% hydrogen and 94% tungsten hexafluoride by mass, corresponding to approximately 90% hydrogen by volume. Gas-phase chemistry is less important in this case and only a single surface reaction is used in the simulation. The showerhead structure is a very significant part of the problem because of its thermal effect: it is heated radiatively by the hot tungsten susceptor (733K) and in turn passes heat to the gas by convection and to the outer wall by radiation.
TALK=T;RUN( 1, 1)
************************************************************
Q1 created by VDI menu, Version 2013, Date 23/03/13
CPVNAM=VDI;SPPNAM=CVD
************************************************************
Echo DISPLAY / USE settings
DISPLAY
This file simulates a simple chemical vapour deposition
reactor for depositing tungsten; the reactor is axisymmetric
and the geometry was provided by Siemens.
Laminar, steady-state flow is assumed.
The susceptor temperature is 733K.
------> Y
|
|
| Z
V
| OUTLET |**********************|
C| |**********************|
E| |**********************|
N| |***** BLOCKAGE *******|W
T| |**********************|A
R| |**********************|L
E| |______________________|L
| |
L| |
I| |
N| |W
E| |A
|***************************************| |L
|********************** BLOCKAGE *******| |L
|***************************************| |
|******* INLET *************************| |
| | | | | | | |*****| |W
| V V V V V V |*****| |A
| |*****| |L
| |*****| |L
| |*****| |
|___________________________ |*****| |
|****** SUSCEPTOR **********| |_____| |
|***************************| |
|______________________________________________|
FLOOR
ENDDIS
************************************************************
IRUNN = 1 ;LIBREF = 104
************************************************************
Group 1. Run Title
TEXT(Tungsten Reactor - normal inlet :D104)
************************************************************
Group 2. Transience
STEADY = T
************************************************************
Groups 3, 4, 5 Grid Information
* Overall number of cells, RSET(M,NX,NY,NZ,tolerance)
RSET(M,1,21,23,7.347739E-05)
* Cylindrical-polar grid
CARTES=F
************************************************************
Group 6. Body-Fitted coordinates
************************************************************
Group 7. Variables: STOREd,SOLVEd,NAMEd
* Non-default variable names
NAME(16)=S177 ;NAME(17)=S80
NAME(18)=S97 ;NAME(141)=ENUL
NAME(142)=BLOK ;NAME(143)=PRPS
NAME(144)=DEPO ;NAME(145)=SPHT
NAME(146)=CNDT ;NAME(147)=EMIS
NAME(148)=VPOR ;NAME(149)=RHO1
NAME(150) =TEM1
* Solved variables list
SOLVE(P1,V1,W1,S80,S97,TEM1)
* Stored variables list
STORE(RHO1,VPOR,EMIS,CNDT,SPHT,DEPO,PRPS,BLOK)
STORE(ENUL,S177)
* Additional solver options
SOLUTN(P1,Y,Y,Y,N,N,N)
SOLUTN(S80,Y,Y,Y,N,N,Y)
SOLUTN(S97,Y,Y,Y,N,N,Y)
SOLUTN(TEM1,Y,Y,Y,N,N,Y)
IVARBK = -1 ;ISOLBK = 1
************************************************************
Group 8. Terms & Devices
DIFCUT =0.
NEWRH1 = T
NEWENL = T
UDIFNE = T
USOURC = T
ISOLX = 0 ;ISOLY = 0 ;ISOLZ = 0
************************************************************
Group 9. Properties
PRESS0 =133.
* Domain material index is 70 signifying:
* NOTSET
SETPRPS(1, 70,Q1)
ENUT =0.
DVO1DT =1.
PRNDTL(S80)=-GRND8 ;PRNDTL(S97)=-GRND8
PRNDTL(TEM1)=-GRND8
PRLH1A =0. ;PRLH1B =0.
PRLH1C =0.
* List of user-defined materials to be read by EARTH
MATFLG=T;IMAT=2
* Name
*Ind. Dens. Viscos. Spec.heat Conduct. Expans. Compr.
* >CVD_GAS>
70 GRND8 GRND8 GRND8 GRND8 1.000 0.000
* constants for GRND option no 1
0. 0.
* constants for GRND option no 2
0. 0.
* constants for GRND option no 3
0. 0.
* constants for GRND option no 4
0. 0.
* >USRM2>
154 1.926E4 1.0 134.0 178.0 0.0 0.0
************************************************************
Group 10.Inter-Phase Transfer Processes
************************************************************
Group 11.Initialise Var/Porosity Fields
FIINIT(P1)=0. ;FIINIT(V1)=0.
FIINIT(W1)=0. ;FIINIT(S177)=0.94
FIINIT(S80)=0.06 ;FIINIT(S97)=1.001E-10
FIINIT(ENUL)=1.001E-10 ;FIINIT(BLOK)=1.
FIINIT(PRPS)=-1. ;FIINIT(DEPO)=1.001E-10
FIINIT(SPHT)=1.001E-10 ;FIINIT(CNDT)=1.001E-10
FIINIT(EMIS)=0. ;FIINIT(VPOR)=1.
FIINIT(RHO1)=1.001E-10 ;FIINIT(TEM1)=293.
No PATCHes used for this Group
INIADD = F
************************************************************
Group 12. Convection and diffusion adjustments
No PATCHes used for this Group
************************************************************
Group 13. Boundary & Special Sources
This patch is attached to object WAFER
PATCH(WAFER, CELL, -1, 1, 0, 0, 0, 0, 1, 1)
COVAL(WAFER, TEM1, FIXVAL, 733.)
EGWF = T
************************************************************
Group 14. Downstream Pressure For PARAB
************************************************************
Group 15. Terminate Sweeps
LSWEEP = 200
RESFAC =1.0E-06
************************************************************
Group 16. Terminate Iterations
************************************************************
Group 17. Relaxation
RELAX(P1 ,LINRLX,1. )
RELAX(V1 ,FALSDT,1000. )
RELAX(W1 ,FALSDT,1000. )
RELAX(S80 ,FALSDT,100. )
RELAX(S97 ,FALSDT,100. )
RELAX(TEM1,LINRLX,0.7 )
************************************************************
Group 18. Limits
VARMAX(P1)=1.0E+10 ;VARMIN(P1)=-106.4
VARMAX(S177)=1. ;VARMIN(S177)=1.0E-20
VARMAX(S80)=1. ;VARMIN(S80)=1.0E-20
VARMAX(S97)=1. ;VARMIN(S97)=1.0E-20
VARMAX(TEM1)=1000. ;VARMIN(TEM1)=293.
************************************************************
Group 19. EARTH Calls To GROUND Station
NAMGRD =CVD
S2SR = T
CSG10 ='q1'
SPEDAT(SET,CVD,MCDOPT,I,2)
SPEDAT(SET,CVD,BINOPT,I,4)
SPEDAT(SET,CVD,MCPROP,I,3)
SPEDAT(SET,CVD,CHMRLX,R,0.5)
SPEDAT(SET,CVD,NGREAC,I,0)
SPEDAT(SET,CVD,NSREAC,I,1)
SPEDAT(SET,CVD,SREAC(1),I,17)
SPEDAT(SET,CVD,RADCVD,L,T)
SPEDAT(SET,S2SR,XMIR,L,F)
SPEDAT(SET,S2SR,YMIR,L,F)
SPEDAT(SET,S2SR,ZMIR,L,F)
SPEDAT(SET,S2SR,AXIBFC,L,F)
SPEDAT(SET,S2SR,FINE3D,L,F)
SPEDAT(SET,S2SR,VFNORM,L,T)
SPEDAT(SET,S2SR,NUMRAY,I,1)
************************************************************
Group 20. Preliminary Printout
************************************************************
Group 21. Print-out of Variables
************************************************************
Group 22. Monitor Print-Out
IXMON = 1 ;IYMON = 12 ;IZMON = 19
NPRMON = 100000
NPRMNT = 1
TSTSWP = -1
************************************************************
Group 23.Field Print-Out & Plot Control
NPRINT = 100000
ISWPRF = 1 ;ISWPRL = 100000
No PATCHes used for this Group
************************************************************
Group 24. Dumps For Restarts
GVIEW(P,-1.,0.,0.)
GVIEW(UP,0.,1.,0.)
GVIEW(NEARPLANE,3.37996E-04)
GVIEW(VDIS,0.110978)
GVIEW(CENTRE,7.836923E-03,0.0785,0.084499)
> DOM, SIZE, 1.000000E-01, 1.570000E-01, 1.689980E-01
> DOM, MONIT, 0.000000E+00, 1.057500E-01, 1.469985E-01
> DOM, SCALE, 1.000000E+00, 1.000000E+00, 1.000000E+00
> DOM, INCREMENT, 1.000000E-02, 1.000000E-02, 1.000000E-02
> GRID, RSET_X_1, 1, 1.000000E+00
> GRID, RSET_Y_1, 7, 1.000000E+00
> GRID, RSET_Y_2, 2, 1.000000E+00
> GRID, RSET_Y_3, 1, 1.000000E+00
> GRID, RSET_Y_4, 1, 1.000000E+00
> GRID, RSET_Y_5, 2, 1.000000E+00
> GRID, RSET_Y_6, 2, 1.000000E+00
> GRID, RSET_Y_7, 2, 1.000000E+00
> GRID, RSET_Y_8, 4, 1.000000E+00
> GRID, RSET_Z_1, 5, 1.000000E+00
> GRID, RSET_Z_2, 1, 1.000000E+00
> GRID, RSET_Z_3, 4, 1.000000E+00
> GRID, RSET_Z_4, 1, 1.000000E+00
> GRID, RSET_Z_5, 2, 1.000000E+00
> GRID, RSET_Z_6, 1, 1.000000E+00
> GRID, RSET_Z_7, 6, 1.000000E+00
> GRID, RSET_Z_8, 1, 1.000000E+00
> GRID, RSET_Z_9, 2, 1.000000E+00
> DOM, T_AMBIENT, 0.000000E+00
> OBJ, NAME, Y1
> OBJ, POSITION, 0.000000E+00, 7.000000E-02, 0.000000E+00
> OBJ, SIZE, 1.000000E-01, 0.000000E+00, 1.689980E-01
> OBJ, GEOMETRY, wirexyz
> OBJ, TYPE, NULL
> OBJ, NAME, Y2
> OBJ, POSITION, 0.000000E+00, 8.800000E-02, 0.000000E+00
> OBJ, SIZE, 1.000000E-01, 0.000000E+00, 1.689980E-01
> OBJ, GEOMETRY, wirexyz
> OBJ, TYPE, NULL
> OBJ, NAME, Z2
> OBJ, POSITION, 0.000000E+00, 0.000000E+00, 5.350000E-02
> OBJ, SIZE, 1.000000E-01, 1.570000E-01, 0.000000E+00
> OBJ, GEOMETRY, wirexyz
> OBJ, TYPE, NULL
> OBJ, NAME, Z3
> OBJ, POSITION, 0.000000E+00, 0.000000E+00, 9.350000E-02
> OBJ, SIZE, 1.000000E-01, 1.570000E-01, 0.000000E+00
> OBJ, GEOMETRY, wirexyz
> OBJ, TYPE, NULL
> OBJ, NAME, Z5
> OBJ, POSITION, 0.000000E+00, 0.000000E+00, 1.170000E-01
> OBJ, SIZE, 1.000000E-01, 1.570000E-01, 0.000000E+00
> OBJ, GEOMETRY, wirexyz
> OBJ, TYPE, NULL
> OBJ, NAME, BLK1
> OBJ, POSITION, 0.000000E+00, 0.000000E+00, 1.549980E-01
> OBJ, SIZE, 1.000000E-01, 1.170000E-01, 1.400000E-02
> OBJ, GEOMETRY, polcu8
> OBJ, TYPE, BLOCKAGE
> OBJ, MATERIAL, 154,NOTSET
> OBJ, INI_BLOK, 2.
> OBJ, SUF_REAC_L, YES
> OBJ, BATCH_F_L, 1.
> OBJ, NAME, BLK2
> OBJ, POSITION, 0.000000E+00, 9.500000E-02, 0.000000E+00
> OBJ, SIZE, 1.000000E-01, 6.200000E-02, 5.000000E-02
> OBJ, GEOMETRY, polcu7
> OBJ, TYPE, BLOCKAGE
> OBJ, MATERIAL, 198,Solid with smooth-wall friction
> OBJ, EMISSIV_W, 1.
> OBJ, EMISSIV_E, 1.
> OBJ, SURF_TEMP_S, 0. ,328.
> OBJ, EMISSIV_S, 1.
> OBJ, EMISSIV_N, 1.
> OBJ, EMISSIV_L, 1.
> OBJ, SURF_TEMP_H, 0. ,328.
> OBJ, EMISSIV_H, 1.
> OBJ, NAME, BLK3
> OBJ, POSITION, 0.000000E+00, 0.000000E+00, 9.700000E-02
> OBJ, SIZE, 1.000000E-01, 1.470000E-01, 2.600000E-02
> OBJ, GEOMETRY, polcu8
> OBJ, TYPE, BLOCKAGE
> OBJ, MATERIAL, 111,STEEL at 27 deg c (C = 1%)
> OBJ, INI_BLOK, 3.
> OBJ, NAME, BLK4
> OBJ, POSITION, 0.000000E+00, 1.290000E-01, 1.230000E-01
> OBJ, SIZE, 1.000000E-01, 1.800000E-02, 3.599800E-02
> OBJ, GEOMETRY, polcu8
> OBJ, TYPE, BLOCKAGE
> OBJ, MATERIAL, 111,STEEL at 27 deg c (C = 1%)
> OBJ, INI_BLOK, 3.
> OBJ, NAME, INLET
> OBJ, POSITION, 0.000000E+00, 0.000000E+00, 1.230000E-01
> OBJ, SIZE, 1.000000E-01, 1.020000E-01, 0.000000E+00
> OBJ, GEOMETRY, polcu5t
> OBJ, TYPE, INLET
> OBJ, DENSITY, 1.7E-03
> OBJ, VELOCITY, 0. ,0. ,4.035
> OBJ, TEMPERATURE, 293.
> OBJ, INLET_S80, 0.06
> OBJ, OBJECT-SIDE, HIGH
> OBJ, NAME, OUT
> OBJ, POSITION, 0.000000E+00, 0.000000E+00, 0.000000E+00
> OBJ, SIZE, 1.000000E-01, 9.500000E-02, 0.000000E+00
> OBJ, GEOMETRY, polcubet
> OBJ, TYPE, OUTLET
> OBJ, PRESSURE, 0.
> OBJ, TEMPERATURE, SAME
> OBJ, COEFFICIENT, 1000.
> OBJ, VELOCITY, 0. , SAME , SAME
> OBJ, OUTLET_S80, SAME
> OBJ, OUTLET_S97, SAME
> OBJ, NAME, WAFER
> OBJ, POSITION, 0.000000E+00, 0.000000E+00, 1.549980E-01
> OBJ, SIZE, 1.000000E-01, 1.020000E-01, 1.400000E-02
> OBJ, GEOMETRY, poldef
> OBJ, TYPE, CELLTYPE
> OBJ, PATCHES, WAFER
> OBJ, NAME, FLOOR
> OBJ, POSITION, 0.000000E+00, 1.170000E-01, 1.689980E-01
> OBJ, SIZE, 1.000000E-01, 4.000000E-02, 0.000000E+00
> OBJ, GEOMETRY, polcu2
> OBJ, TYPE, PLATE
> OBJ, SURF_TEMP, 0. ,328.
> OBJ, EMISSIVITY, 1.
> OBJ, NAME, WALL
> OBJ, POSITION, 0.000000E+00, 1.570000E-01, 5.000000E-02
> OBJ, SIZE, 1.000000E-01, 0.000000E+00, 1.189980E-01
> OBJ, GEOMETRY, polcu2
> OBJ, TYPE, PLATE
> OBJ, SURF_TEMP, 0. ,328.
> OBJ, EMISSIVITY, 1.
> OBJ, NAME, @RI001
> OBJ, POSITION, 0.000000E+00, 0.000000E+00, 1.549980E-01
> OBJ, SIZE, 1.000000E-01, 1.170000E-01, 0.000000E+00
> OBJ, GEOMETRY, polcusrf
> OBJ, TYPE, RAD_SURF
> OBJ, OBJECT-SIDE, HIGH
> OBJ, SETTING, AUTO
> OBJ, TEMP_COEF, GRND1
> OBJ, OPTIC_INDX, 154.
> OBJ, OPTIC_TEMP, 733.
> OBJ, NAME, @RI002
> OBJ, POSITION, 0.000000E+00, 1.170000E-01, 1.549980E-01
> OBJ, SIZE, 1.000000E-01, 0.000000E+00, 1.400000E-02
> OBJ, GEOMETRY, polcusrf
> OBJ, TYPE, RAD_SURF
> OBJ, SETTING, AUTO
> OBJ, TEMP_COEF, GRND1
> OBJ, OPTIC_INDX, 154.
> OBJ, OPTIC_TEMP, 733.
> OBJ, NAME, @RI003
> OBJ, POSITION, 0.000000E+00, 1.170000E-01, 1.689980E-01
> OBJ, SIZE, 1.000000E-01, 4.000000E-02, 0.000000E+00
> OBJ, GEOMETRY, polcusrf
> OBJ, TYPE, RAD_SURF
> OBJ, SETTING, AUTO
> OBJ, SURF_TEMP, 328.
> OBJ, OPTIC_INDX, 111.
> OBJ, OPTIC_TEMP, 328.
> OBJ, NAME, @RI004
> OBJ, POSITION, 0.000000E+00, 1.570000E-01, 5.000000E-02
> OBJ, SIZE, 1.000000E-01, 0.000000E+00, 1.189980E-01
> OBJ, GEOMETRY, polcusrf
> OBJ, TYPE, RAD_SURF
> OBJ, SETTING, AUTO
> OBJ, SURF_TEMP, 328.
> OBJ, OPTIC_INDX, 111.
> OBJ, OPTIC_TEMP, 328.
> OBJ, NAME, @RI005
> OBJ, POSITION, 0.000000E+00, 9.500000E-02, 5.000000E-02
> OBJ, SIZE, 1.000000E-01, 6.200000E-02, 0.000000E+00
> OBJ, GEOMETRY, polcusrf
> OBJ, TYPE, RAD_SURF
> OBJ, OBJECT-SIDE, HIGH
> OBJ, SETTING, AUTO
> OBJ, SURF_TEMP, 328.
> OBJ, OPTIC_INDX, 111.
> OBJ, OPTIC_TEMP, 328.
> OBJ, NAME, @RI006
> OBJ, POSITION, 0.000000E+00, 9.500000E-02, 0.000000E+00
> OBJ, SIZE, 1.000000E-01, 0.000000E+00, 5.000000E-02
> OBJ, GEOMETRY, polcusrf
> OBJ, TYPE, RAD_SURF
> OBJ, SETTING, AUTO
> OBJ, SURF_TEMP, 328.
> OBJ, OPTIC_INDX, 111.
> OBJ, OPTIC_TEMP, 328.
> OBJ, NAME, @RI007
> OBJ, POSITION, 0.000000E+00, 0.000000E+00, 0.000000E+00
> OBJ, SIZE, 1.000000E-01, 9.500000E-02, 0.000000E+00
> OBJ, GEOMETRY, polcusrf
> OBJ, TYPE, RAD_SURF
> OBJ, SETTING, AUTO
> OBJ, SURF_TEMP, 300.
> OBJ, OPTIC_INDX, 111.
> OBJ, OPTIC_TEMP, 300.
> OBJ, NAME, @RI008
> OBJ, POSITION, 0.000000E+00, 0.000000E+00, 9.700000E-02
> OBJ, SIZE, 1.000000E-01, 1.470000E-01, 0.000000E+00
> OBJ, GEOMETRY, polcusrf
> OBJ, TYPE, RAD_SURF
> OBJ, OBJECT-SIDE, HIGH
> OBJ, SETTING, AUTO
> OBJ, TEMP_COEF, GRND1
> OBJ, OPTIC_INDX, 111.
> OBJ, OPTIC_TEMP, 440.
> OBJ, NAME, @RI009
> OBJ, POSITION, 0.000000E+00, 1.470000E-01, 9.700000E-02
> OBJ, SIZE, 1.000000E-01, 0.000000E+00, 6.199800E-02
> OBJ, GEOMETRY, polcusrf
> OBJ, TYPE, RAD_SURF
> OBJ, SETTING, AUTO
> OBJ, TEMP_COEF, GRND1
> OBJ, OPTIC_INDX, 111.
> OBJ, OPTIC_TEMP, 440.
> OBJ, NAME, @RI010
> OBJ, POSITION, 0.000000E+00, 1.290000E-01, 1.589980E-01
> OBJ, SIZE, 1.000000E-01, 1.800000E-02, 0.000000E+00
> OBJ, GEOMETRY, polcusrf
> OBJ, TYPE, RAD_SURF
> OBJ, SETTING, AUTO
> OBJ, TEMP_COEF, GRND1
> OBJ, OPTIC_INDX, 111.
> OBJ, OPTIC_TEMP, 440.
> OBJ, NAME, @RI011
> OBJ, POSITION, 0.000000E+00, 1.290000E-01, 1.230000E-01
> OBJ, SIZE, 1.000000E-01, 0.000000E+00, 3.599800E-02
> OBJ, GEOMETRY, polcusrf
> OBJ, TYPE, RAD_SURF
> OBJ, OBJECT-SIDE, HIGH
> OBJ, SETTING, AUTO
> OBJ, TEMP_COEF, GRND1
> OBJ, OPTIC_INDX, 111.
> OBJ, OPTIC_TEMP, 440.
> OBJ, NAME, @RI012
> OBJ, POSITION, 0.000000E+00, 0.000000E+00, 1.230000E-01
> OBJ, SIZE, 1.000000E-01, 1.290000E-01, 0.000000E+00
> OBJ, GEOMETRY, polcusrf
> OBJ, TYPE, RAD_SURF
> OBJ, SETTING, AUTO
> OBJ, TEMP_COEF, GRND1
> OBJ, OPTIC_INDX, 111.
> OBJ, OPTIC_TEMP, 440.
************************************************************
STOP
</strong></pre></body></html>
The plasma enhanced reactor is for silicon deposition from pure silane. Three gas-phase and two surface reactions are included, all dependent on the state of the plasma. The gas-phase reaction rates all exhibit dependence on ionization rate while the surface reaction rates all have an Arrhenius formulation, based on surface temperature, multiplied by the ion flux to the surface. (The reactions defined in CHEMIDAT for this simulation are for demonstration purposes only.)
TALK=T;RUN( 1, 1)
************************************************************
Q1 created by VDI menu, Version 2013, Date 23/03/13
CPVNAM=VDI;SPPNAM=CVD
************************************************************
Echo DISPLAY / USE settings
DISPLAY
This case simulates a reactor using a plasma to enhance
the gas phase chemistry. The reactor is axisymmetric,
the geometry shown below.
Laminar, steady-state flow is assumed.
The susceptor temperature is 533K.
------> Y
|
|
| Z
V
|************************************| INLET |
|*********** BLOCKAGE****************| |
|____________________________________| |W
C| |A
E| |L
N| PLASMA REGION |L
T| |
R| |
E|-----------WAFER-------------- |W
|******************************| |A
L|******************************| |L
I|******************************| |L
N|********* BLOCKAGE ***********| |
E|******************************| |
|******************************| |W
|******************************| |A
|******************************| |L
|******************************| |L
|______________________________| OUTLET |
ENDDIS
************************************************************
IRUNN = 1 ;LIBREF = 109
************************************************************
Group 1. Run Title
TEXT(Parallel Plate Plasma Reactor :D109)
************************************************************
Group 2. Transience
STEADY = T
************************************************************
Groups 3, 4, 5 Grid Information
* Overall number of cells, RSET(M,NX,NY,NZ,tolerance)
RSET(M,1,29,19,1.0E-05)
* Cylindrical-polar grid
CARTES=F
************************************************************
Group 6. Body-Fitted coordinates
************************************************************
Group 7. Variables: STOREd,SOLVEd,NAMEd
* Non-default variable names
NAME(16)=S140 ;NAME(17)=S142
NAME(18)=S145 ;NAME(19)=S158
NAME(20)=S80 ;NAME(136)=SPHT
NAME(137)=ENUL ;NAME(138)=BLOK
NAME(139)=PRPS ;NAME(140)=DEPO
NAME(141)=VPOR ;NAME(142)=RHO1
NAME(143)=GION ;NAME(144)=GAMM
NAME(145)=PHIT ;NAME(146)=T0
NAME(147)=NE ;NAME(148)=PHI2
NAME(149)=PHI1 ;NAME(150)=TEM1
* Solved variables list
SOLVE(P1,V1,W1,S142,S145,S158,S80,T0)
SOLVE(NE,PHI2,PHI1,TEM1)
* Stored variables list
STORE(PHIT,GAMM,GION,RHO1,VPOR,DEPO,PRPS,BLOK)
STORE(ENUL,SPHT,S140)
* Additional solver options
SOLUTN(P1,Y,Y,Y,N,N,N)
SOLUTN(S142,Y,Y,Y,N,N,Y)
SOLUTN(S145,Y,Y,Y,N,N,Y)
SOLUTN(S158,Y,Y,Y,N,N,Y)
SOLUTN(S80,Y,Y,Y,N,N,Y)
SOLUTN(T0,Y,Y,Y,N,N,Y)
SOLUTN(NE,Y,Y,Y,N,N,Y)
SOLUTN(PHI2,Y,Y,Y,N,N,Y)
SOLUTN(PHI1,Y,Y,Y,N,N,Y)
SOLUTN(TEM1,Y,Y,Y,N,N,Y)
IVARBK = -1 ;ISOLBK = 1
************************************************************
Group 8. Terms & Devices
TERMS (T0 ,N,N,Y,Y,Y,N)
TERMS (NE ,N,N,Y,Y,Y,N)
TERMS (PHI2,N,N,Y,Y,Y,N)
TERMS (PHI1,N,N,Y,Y,Y,N)
DIFCUT =0.
ADDDIF = T
NEWRH1 = T
NEWENL = T
UDIFNE = T
USOURC = T
ISOLX = 0 ;ISOLY = 0 ;ISOLZ = 0
************************************************************
Group 9. Properties
PRESS0 =10.
* Domain material index is 70 signifying:
* CVD_GAS
SETPRPS(1, 70,Q1)
ENUT =0.
DVO1DT =1.
PRNDTL(S142)=-GRND8 ;PRNDTL(S145)=-GRND8
PRNDTL(S158)=-GRND8 ;PRNDTL(S80)=-GRND8
PRNDTL(T0)=-GRND7 ;PRNDTL(NE)=-GRND7
PRNDTL(PHI2)=-GRND7 ;PRNDTL(PHI1)=-GRND7
PRNDTL(TEM1)=-GRND8
PRLH1A =0. ;PRLH1B =0.
PRLH1C =0.
* List of user-defined materials to be read by EARTH
MATFLG=T;IMAT=1
* Name
*Ind. Dens. Viscos. Spec.heat Conduct. Expans. Compr.
* >CVD_GAS>
70 GRND8 GRND8 GRND8 GRND8 1.000 0.000
* constants for GRND option no 1
0. 0.
* constants for GRND option no 2
0. 0.
* constants for GRND option no 3
0. 0.
* constants for GRND option no 4
0. 0.
************************************************************
Group 10.Inter-Phase Transfer Processes
************************************************************
Group 11.Initialise Var/Porosity Fields
FIINIT(P1)=0. ;FIINIT(V1)=0.
FIINIT(W1)=0. ;FIINIT(S140)=1.
FIINIT(S142)=1.001E-10 ;FIINIT(S145)=1.001E-10
FIINIT(S158)=1.001E-10 ;FIINIT(S80)=1.001E-10
FIINIT(SPHT)=1.001E-10 ;FIINIT(ENUL)=1.001E-10
FIINIT(BLOK)=1. ;FIINIT(PRPS)=-1.
FIINIT(DEPO)=1.001E-10 ;FIINIT(VPOR)=1.
FIINIT(RHO1)=1.001E-10 ;FIINIT(GION)=1.001E-10
FIINIT(GAMM)=1.001E-10 ;FIINIT(PHIT)=1.001E-10
FIINIT(T0)=1.1E+04 ;FIINIT(NE)=1.0E-02
FIINIT(PHI2)=0. ;FIINIT(PHI1)=100.
FIINIT(TEM1)=300.
No PATCHes used for this Group
INIADD = F
************************************************************
Group 12. Convection and diffusion adjustments
No PATCHes used for this Group
************************************************************
Group 13. Boundary & Special Sources
This patch is attached to object VIN1
INLET(VIN1, LOW, -1, 0, 0, 0, 0, 0, 1, 1)
VALUE(VIN1, P1, 10.)
VALUE(VIN1, V1, 0.)
VALUE(VIN1, W1, 0.030376)
VALUE(VIN1, S140, 1.)
VALUE(VIN1, S142, 0.)
VALUE(VIN1, S145, 0.)
VALUE(VIN1, S158, 0.)
VALUE(VIN1, S80, 0.)
VALUE(VIN1, T0, 0.)
VALUE(VIN1, NE, 0.)
VALUE(VIN1, PHI2, 0.)
VALUE(VIN1, PHI1, 0.)
VALUE(VIN1, TEM1, 300.)
PATCH(COOL, VOLUME, 0, 0, 0, 0, 0, 0, 1, 1)
COVAL(COOL, T0, GRND7, GRND7)
COVAL(COOL, NE, GRND7, GRND7)
PATCH(IONIZE, VOLUME, 0, 0, 0, 0, 0, 0, 1, 1)
COVAL(IONIZE, T0, GRND7, GRND7)
COVAL(IONIZE, NE, GRND7, GRND7)
PATCH(CHEM, VOLUME, 0, 0, 0, 0, 0, 0, 1, 1)
COVAL(CHEM, S142, GRND1, GRND1)
COVAL(CHEM, S145, GRND1, GRND1)
COVAL(CHEM, S158, GRND1, GRND1)
COVAL(CHEM, S80, GRND1, GRND1)
COVAL(CHEM, TEM1, GRND1, GRND1)
PATCH(RELT, PHASEM, 0, 0, 0, 0, 0, 0, 1, 1)
COVAL(RELT, S142, GRND1, SAME)
COVAL(RELT, S145, GRND1, SAME)
COVAL(RELT, S158, GRND1, SAME)
COVAL(RELT, S80, GRND1, SAME)
EGWF = T
************************************************************
Group 14. Downstream Pressure For PARAB
************************************************************
Group 15. Terminate Sweeps
LSWEEP = 300
RESFAC =1.0E-03
************************************************************
Group 16. Terminate Iterations
LITER(S142)=200 ;LITER(S145)=200
LITER(S158)=200 ;LITER(S80)=200
************************************************************
Group 17. Relaxation
RELAX(P1 ,LINRLX,0.3 )
RELAX(V1 ,FALSDT,1.0E-04 )
RELAX(W1 ,FALSDT,1.0E-04 )
RELAX(S142,FALSDT,1. )
RELAX(S145,FALSDT,1. )
RELAX(S158,FALSDT,1. )
RELAX(S80 ,FALSDT,1. )
RELAX(T0 ,FALSDT,1.0E-08 )
RELAX(NE ,FALSDT,1.0E-08 )
RELAX(PHI2,FALSDT,1.0E-06 )
RELAX(PHI1,FALSDT,1.0E-06 )
RELAX(TEM1,LINRLX,0.3 )
************************************************************
Group 18. Limits
VARMAX(P1)=1.0E+10 ;VARMIN(P1)=-8.
VARMAX(S140)=1. ;VARMIN(S140)=1.0E-20
VARMAX(S142)=1. ;VARMIN(S142)=1.0E-20
VARMAX(S145)=1. ;VARMIN(S145)=1.0E-20
VARMAX(S158)=1. ;VARMIN(S158)=1.0E-20
VARMAX(S80)=1. ;VARMIN(S80)=1.0E-20
VARMAX(TEM1)=2000. ;VARMIN(TEM1)=260.
************************************************************
Group 19. EARTH Calls To GROUND Station
NAMGRD =CVD
CSG10 ='q1'
SPEDAT(SET,CVD,MCDOPT,I,2)
SPEDAT(SET,CVD,BINOPT,I,4)
SPEDAT(SET,CVD,MCPROP,I,3)
SPEDAT(SET,CVD,CHMRLX,R,1.)
SPEDAT(SET,CVD,NGREAC,I,3)
SPEDAT(SET,CVD,GREAC(1),I,18)
SPEDAT(SET,CVD,GREAC(2),I,21)
SPEDAT(SET,CVD,GREAC(3),I,22)
SPEDAT(SET,CVD,NSREAC,I,2)
SPEDAT(SET,CVD,SREAC(1),I,19)
SPEDAT(SET,CVD,SREAC(2),I,20)
SPEDAT(SET,CVD,PHIPAR(1),R,2.)
SPEDAT(SET,CVD,PHIPAR(2),R,0.8)
SPEDAT(SET,CVD,PHIPAR(3),R,0.)
SPEDAT(SET,CVD,PHIPAR(4),R,200.)
SPEDAT(SET,CVD,NEPAR(1),R,18.)
SPEDAT(SET,CVD,NEPAR(2),R,5.0E+05)
SPEDAT(SET,CVD,NEPAR(3),R,3.0E+05)
SPEDAT(SET,CVD,NEPAR(4),R,1.3E+05)
SPEDAT(SET,CVD,NEPAR(5),R,0.18)
SPEDAT(SET,CVD,T0PAR(2),R,0.3)
SPEDAT(SET,CVD,T0PAR(1),R,3500.)
SPEDAT(SET,CVD,T0PAR(3),R,6.0E+05)
SPEDAT(SET,CVD,T0PAR(4),R,1.0E+04)
SPEDAT(SET,CVD,LNELIM,L,F)
SPEDAT(SET,CVD,PLASMA,L,T)
************************************************************
Group 20. Preliminary Printout
************************************************************
Group 21. Print-out of Variables
************************************************************
Group 22. Monitor Print-Out
IXMON = 1 ;IYMON = 1 ;IZMON = 12
NPRMON = 100000
NPRMNT = 1
TSTSWP = -1
************************************************************
Group 23.Field Print-Out & Plot Control
NPRINT = 100000
YZPR = T
ISWPRF = 1 ;ISWPRL = 100000
No PATCHes used for this Group
************************************************************
Group 24. Dumps For Restarts
GVIEW(P,-0.978781,0.149021,0.140641)
GVIEW(UP,0.14657,0.988813,-0.027686)
GVIEW(NEARPLANE,3.26E-04)
GVIEW(VDIS,0.124332)
GVIEW(CENTRE,8.136423E-03,0.0815,0.0327)
> DOM, SIZE, 1.000000E-01, 1.630000E-01, 6.540000E-02
> DOM, MONIT, 0.000000E+00, 2.500000E-03, 2.890000E-02
> DOM, SCALE, 1.000000E+00, 1.000000E+00, 1.000000E+00
> DOM, INCREMENT, 1.000000E-02, 1.000000E-02, 1.000000E-02
> GRID, RSET_X_1, 1, 1.000000E+00
> GRID, RSET_Y_1, 4, 1.000000E+00
> GRID, RSET_Y_2, 9, 1.000000E+00
> GRID, RSET_Y_3, 2, 1.000000E+00
> GRID, RSET_Y_4, 1, 1.000000E+00
> GRID, RSET_Y_5, 1, 1.000000E+00
> GRID, RSET_Y_6, 1, 1.000000E+00
> GRID, RSET_Y_7, 1, 1.000000E+00
> GRID, RSET_Y_8, 1, 1.000000E+00
> GRID, RSET_Y_9, 4, 1.000000E+00
> GRID, RSET_Y_10, 3, 1.000000E+00
> GRID, RSET_Y_11, 1, 1.000000E+00
> GRID, RSET_Y_12, 1, 1.000000E+00
> GRID, RSET_Z_1, 1, 1.000000E+00
> GRID, RSET_Z_2, 2, 1.000000E+00
> GRID, RSET_Z_3, 7, 1.000000E+00
> GRID, RSET_Z_4, 2, 1.000000E+00
> GRID, RSET_Z_5, 2, 1.000000E+00
> GRID, RSET_Z_6, 4, 1.000000E+00
> GRID, RSET_Z_7, 1, 1.000000E+00
> DOM, T_AMBIENT, 0.000000E+00
> OBJ, NAME, Y1
> OBJ, POSITION, 0.000000E+00, 2.000000E-02, 0.000000E+00
> OBJ, SIZE, 1.000000E-01, 0.000000E+00, 6.540000E-02
> OBJ, GEOMETRY, wirexyz
> OBJ, TYPE, NULL
> OBJ, NAME, Y2
> OBJ, POSITION, 0.000000E+00, 9.200000E-02, 0.000000E+00
> OBJ, SIZE, 1.000000E-01, 0.000000E+00, 6.540000E-02
> OBJ, GEOMETRY, wirexyz
> OBJ, TYPE, NULL
> OBJ, NAME, Y4
> OBJ, POSITION, 0.000000E+00, 1.020000E-01, 0.000000E+00
> OBJ, SIZE, 1.000000E-01, 0.000000E+00, 6.540000E-02
> OBJ, GEOMETRY, wirexyz
> OBJ, TYPE, NULL
> OBJ, NAME, Y5
> OBJ, POSITION, 0.000000E+00, 1.035000E-01, 0.000000E+00
> OBJ, SIZE, 1.000000E-01, 0.000000E+00, 6.540000E-02
> OBJ, GEOMETRY, wirexyz
> OBJ, TYPE, NULL
> OBJ, NAME, Y6
> OBJ, POSITION, 0.000000E+00, 1.055000E-01, 0.000000E+00
> OBJ, SIZE, 1.000000E-01, 0.000000E+00, 6.540000E-02
> OBJ, GEOMETRY, wirexyz
> OBJ, TYPE, NULL
> OBJ, NAME, Y7
> OBJ, POSITION, 0.000000E+00, 1.070000E-01, 0.000000E+00
> OBJ, SIZE, 1.000000E-01, 0.000000E+00, 6.540000E-02
> OBJ, GEOMETRY, wirexyz
> OBJ, TYPE, NULL
> OBJ, NAME, Y8
> OBJ, POSITION, 0.000000E+00, 1.100000E-01, 0.000000E+00
> OBJ, SIZE, 1.000000E-01, 0.000000E+00, 6.540000E-02
> OBJ, GEOMETRY, wirexyz
> OBJ, TYPE, NULL
> OBJ, NAME, Y10
> OBJ, POSITION, 0.000000E+00, 1.570000E-01, 0.000000E+00
> OBJ, SIZE, 1.000000E-01, 0.000000E+00, 6.540000E-02
> OBJ, GEOMETRY, wirexyz
> OBJ, TYPE, NULL
> OBJ, NAME, Y11
> OBJ, POSITION, 0.000000E+00, 1.610000E-01, 0.000000E+00
> OBJ, SIZE, 1.000000E-01, 0.000000E+00, 6.540000E-02
> OBJ, GEOMETRY, wirexyz
> OBJ, TYPE, NULL
> OBJ, NAME, Z2
> OBJ, POSITION, 0.000000E+00, 0.000000E+00, 1.200000E-02
> OBJ, SIZE, 1.000000E-01, 1.630000E-01, 0.000000E+00
> OBJ, GEOMETRY, wirexyz
> OBJ, TYPE, NULL
> OBJ, NAME, Z3
> OBJ, POSITION, 0.000000E+00, 0.000000E+00, 2.740000E-02
> OBJ, SIZE, 1.000000E-01, 1.630000E-01, 0.000000E+00
> OBJ, GEOMETRY, wirexyz
> OBJ, TYPE, NULL
> OBJ, NAME, Z5
> OBJ, POSITION, 0.000000E+00, 0.000000E+00, 3.460000E-02
> OBJ, SIZE, 1.000000E-01, 1.630000E-01, 0.000000E+00
> OBJ, GEOMETRY, wirexyz
> OBJ, TYPE, NULL
> OBJ, NAME, Z6
> OBJ, POSITION, 0.000000E+00, 0.000000E+00, 5.540000E-02
> OBJ, SIZE, 1.000000E-01, 1.630000E-01, 0.000000E+00
> OBJ, GEOMETRY, wirexyz
> OBJ, TYPE, NULL
> OBJ, NAME, CMP0
> OBJ, POSITION, 0.000000E+00, 0.000000E+00, 0.000000E+00
> OBJ, SIZE, 1.000000E-01, 1.300000E-01, 1.000000E-02
> OBJ, GEOMETRY, polcu7
> OBJ, TYPE, BLOCKAGE
> OBJ, MATERIAL, 198,Solid with smooth-wall friction
> OBJ, SURF_TEMP_H, 0. ,300.
> OBJ, NAME, CMP1
> OBJ, POSITION, 0.000000E+00, 0.000000E+00, 2.940000E-02
> OBJ, SIZE, 1.000000E-01, 1.000000E-01, 3.600000E-02
> OBJ, GEOMETRY, polcu7
> OBJ, TYPE, BLOCKAGE
> OBJ, MATERIAL, 198,Solid with smooth-wall friction
> OBJ, LINR_HEAT_L, FIXVAL ,533.
> OBJ, PLASMA-AC_N, EARTHED
> OBJ, SUF_REAC_L, YES
> OBJ, BATCH_F_L, 1.
> OBJ, PLASMA-AC_L, EARTHED
> OBJ, NAME, VIN1
> OBJ, POSITION, 0.000000E+00, 1.300000E-01, 0.000000E+00
> OBJ, SIZE, 1.000000E-01, 3.300000E-02, 0.000000E+00
> OBJ, GEOMETRY, poldef
> OBJ, TYPE, USER_DEFINED
> OBJ, PATCHES, VIN1
> OBJ, NAME, OUTLET
> OBJ, POSITION, 0.000000E+00, 1.000000E-01, 6.540000E-02
> OBJ, SIZE, 1.000000E-01, 6.300000E-02, 0.000000E+00
> OBJ, GEOMETRY, polcubet
> OBJ, TYPE, OUTLET
> OBJ, PRESSURE, 0.
> OBJ, TEMPERATURE, SAME
> OBJ, COEFFICIENT, 1.
> OBJ, OUTLET_S142, SAME
> OBJ, OUTLET_S145, SAME
> OBJ, OUTLET_S158, SAME
> OBJ, OUTLET_S80, SAME
> OBJ, NAME, WALL0
> OBJ, POSITION, 0.000000E+00, 1.630000E-01, 0.000000E+00
> OBJ, SIZE, 1.000000E-01, 0.000000E+00, 6.540000E-02
> OBJ, GEOMETRY, polcu2
> OBJ, TYPE, PLATE
> OBJ, SURF_TEMP, 0. ,300.
> OBJ, PLASMA-AC, EARTHED
> OBJ, NAME, ELE1BOT
> OBJ, POSITION, 0.000000E+00, 0.000000E+00, 1.000000E-02
> OBJ, SIZE, 1.000000E-01, 1.000000E-01, 0.000000E+00
> OBJ, GEOMETRY, polcu10
> OBJ, TYPE, PLATE
> OBJ, POROSITY, 0.
> OBJ, SIDE, HIGH
> OBJ, PLASMA-AC_H, ELECTRODE
> OBJ, NAME, ELRING
> OBJ, POSITION, 0.000000E+00, 1.000000E-01, 1.000000E-02
> OBJ, SIZE, 1.000000E-01, 3.000000E-02, 0.000000E+00
> OBJ, GEOMETRY, polcu10
> OBJ, TYPE, PLATE
> OBJ, POROSITY, 0.
> OBJ, SIDE, HIGH
> OBJ, PLASMA-AC_H, EARTHED
************************************************************
STOP