```
TALK=T;RUN(1,1)
DISPLAY
This case simulates a reactor using a plasma to enhance
the gas phase chemistry. The reactor is axisymmetric,
the geometry shown below.
The susceptor temperature is 533K.

------> Y
|
|
| Z
V

|************************************|  INLET  |
|*********** BLOCKAGE****************|         |
|____________________________________|         |W
C|                                              |A
E|                                              |L
N|        PLASMA REGION                         |L
T|                                              |
R|                                              |
E|-----------WAFER--------------                |W
|******************************|               |A
L|******************************|               |L
I|******************************|               |L
N|********* BLOCKAGE ***********|               |
E|******************************|               |
|******************************|               |W
|******************************|               |A
|******************************|               |L
|******************************|               |L
|______________________________|     OUTLET    |

ENDDIS
************************************************************
Group 1. Run Title and Number
************************************************************
************************************************************

TEXT(Parallel Plate Plasma Reactor      :D109)

************************************************************
************************************************************

IRUNN = 1 ;LIBREF = 14
************************************************************
Group 2. Time dependence
************************************************************
Group 3. X-Direction Grid Spacing
CARTES = F
NX = 1
XULAST =0.1
XFRAC(1)=1.
************************************************************
Group 4. Y-Direction Grid Spacing
NY = 29
YVLAST =1.
Method of pairs used for grid setting.
YFRAC(1)=-4. ;YFRAC(2)=5.0E-03
YFRAC(3)=9. ;YFRAC(4)=8.0E-03
YFRAC(5)=2. ;YFRAC(6)=4.0E-03
YFRAC(7)=1. ;YFRAC(8)=2.0E-03
YFRAC(9)=1. ;YFRAC(10)=1.5E-03
YFRAC(11)=1. ;YFRAC(12)=2.0E-03
YFRAC(13)=1. ;YFRAC(14)=1.5E-03
YFRAC(15)=1. ;YFRAC(16)=3.0E-03
YFRAC(17)=4. ;YFRAC(18)=5.0E-03
YFRAC(19)=3. ;YFRAC(20)=9.0E-03
YFRAC(21)=1. ;YFRAC(22)=4.0E-03
YFRAC(23)=1. ;YFRAC(24)=2.0E-03
************************************************************
Group 5. Z-Direction Grid Spacing
PARAB = F
NZ = 19
ZWLAST =1.
Method of pairs used for grid setting.
ZFRAC(1)=-1. ;ZFRAC(2)=1.0E-02
ZFRAC(3)=2. ;ZFRAC(4)=1.0E-03
ZFRAC(5)=7. ;ZFRAC(6)=2.2E-03
ZFRAC(7)=2. ;ZFRAC(8)=1.0E-03
ZFRAC(9)=2. ;ZFRAC(10)=2.6E-03
ZFRAC(11)=4. ;ZFRAC(12)=5.2E-03
ZFRAC(13)=1. ;ZFRAC(14)=1.0E-02
************************************************************
Group 6. Body-Fitted Coordinates
************************************************************
Group 7. Variables: STOREd,SOLVEd,NAMEd
ONEPHS = T
NAME(1)=P1 ;NAME(5)=V1
NAME(7)=W1 ;NAME(16)=S140
NAME(17)=S142 ;NAME(18)=S145
NAME(19)=S158 ;NAME(20)=S80
NAME(136)=SPHT ;NAME(137)=ENUL
NAME(138)=BLOK ;NAME(139)=PRPS
NAME(140)=DEPO ;NAME(142)=RHO1
NAME(143)=GION ;NAME(144)=GAMM
NAME(145)=PHIT ;NAME(146)=T0
NAME(147)=NE ;NAME(148)=PHI2
NAME(149)=PHI1 ;NAME(150)=TEM1
* Y in SOLUTN argument list denotes:
* 1-stored 2-solved 3-whole-field
* 4-point-by-point 5-explicit 6-harmonic averaging
SOLUTN(P1,Y,Y,Y,N,N,N)
SOLUTN(V1,Y,Y,N,N,N,Y)
SOLUTN(W1,Y,Y,N,N,N,Y)
SOLUTN(S140,Y,N,N,N,N,Y)
SOLUTN(S142,Y,Y,Y,N,N,Y)
SOLUTN(S145,Y,Y,Y,N,N,Y)
SOLUTN(S158,Y,Y,Y,N,N,Y)
SOLUTN(S80,Y,Y,Y,N,N,Y)
SOLUTN(SPHT,Y,N,N,N,N,Y)
SOLUTN(ENUL,Y,N,N,N,N,Y)
SOLUTN(BLOK,Y,N,N,N,N,Y)
SOLUTN(PRPS,Y,N,N,N,N,Y)
SOLUTN(DEPO,Y,N,N,N,N,Y)
SOLUTN(RHO1,Y,N,N,N,N,Y)
SOLUTN(GION,Y,N,N,N,N,Y)
SOLUTN(GAMM,Y,N,N,N,N,Y)
SOLUTN(PHIT,Y,N,N,N,N,Y)
SOLUTN(T0,Y,Y,Y,N,N,Y)
SOLUTN(NE,Y,Y,Y,N,N,Y)
SOLUTN(PHI2,Y,Y,Y,N,N,Y)
SOLUTN(PHI1,Y,Y,Y,N,N,Y)
SOLUTN(TEM1,Y,Y,Y,N,N,Y)
DEN1 = 142
VISL = 137
IVARBK = -1 ;ISOLBK = 1
PRNITS= F ;OPTRLX= F ;NOSIP= F ;ALLVBC= F
DBSOLV= F ;IMPINI= F ;EARL1D= F
PRPS = 139
************************************************************
Group 8. Terms & Devices
* Y in TERMS argument list denotes:
* 1-built-in source 2-convection 3-diffusion 4-transient
* 5-first phase variable 6-interphase transport
TERMS(P1,Y,Y,Y,N,Y,Y)
TERMS(V1,Y,Y,Y,Y,Y,Y)
TERMS(W1,Y,Y,Y,Y,Y,Y)
TERMS(S142,N,Y,Y,Y,N,Y)
TERMS(S145,N,Y,Y,Y,Y,Y)
TERMS(S158,N,Y,Y,Y,N,Y)
TERMS(S80,N,Y,Y,Y,Y,Y)
TERMS(T0,N,N,Y,Y,Y,N)
TERMS(NE,N,N,Y,Y,Y,N)
TERMS(PHI2,N,N,Y,Y,Y,N)
TERMS(PHI1,N,N,Y,Y,Y,N)
TERMS(TEM1,N,Y,Y,Y,Y,Y)
DIFCUT =0. ;ZDIFAC =1.
GALA = F ;ADDDIF = T
NEWRH1 = T
NEWENL = T
UDIFNE = T
USOURC = T
ISOLX = 0 ;ISOLY = 0 ;ISOLZ = 0
************************************************************
Group 9. Properties used if PRPS is not
stored, and where PRPS = -1.0 if it is!
RHO1 = GRND8 ;TMP1 =0.
EL1 =0.
TSURR =0. ;TEMP0 =0.
PRESS0 =10.
DVO1DT =1. ;DRH1DP =0.
RHO1A =0. ;RHO1B =0.
RHO1C =0.
EMISS =0. ;SCATT =0.
ENUL = GRND8 ;ENUT =0.
ENULA =0. ;ENULB =0.
ENULC =0.
PRNDTL(V1)=1. ;PRNDTL(W1)=1.
PRNDTL(S142)=-GRND8 ;PRNDTL(S145)=-GRND8
PRNDTL(S158)=-GRND8 ;PRNDTL(S80)=-GRND8
PRNDTL(T0)=-GRND7 ;PRNDTL(NE)=-GRND7
PRNDTL(PHI2)=-GRND7 ;PRNDTL(PHI1)=-GRND7
PRNDTL(TEM1)=-GRND8
PRLH1A =0. ;PRLH1B =0.
PRLH1C =0.
PRT(V1)=1. ;PRT(W1)=1.
PRT(S142)=1. ;PRT(S145)=1.
PRT(S158)=1. ;PRT(S80)=1.
PRT(T0)=1. ;PRT(NE)=1.
PRT(PHI2)=1. ;PRT(PHI1)=1.
PRT(TEM1)=1.
CP1 = GRND8 ;CP2 =1.
CP1A =0. ;CP1B =0.
CP1C =0. ;CP1D =0.
*  List of user-defined materials to be read by EARTH
MATFLG=T;IMAT=1
*  Name
*Ind. Dens.  Viscos.  Spec.heat  Conduct.  Expans.  Compr.
*
70 GRND8 GRND8 GRND8 GRND8 1.000
*       constants for GRND option no 1
0.0 0.0 0.0
*       constants for GRND option no 2
0.0 0.0 0.0
*       constants for GRND option no 3
0.0 0.0 0.0
*       constants for GRND option no 4
0.0 0.0 0.0
************************************************************
Group 10.Inter-Phase Transfer Processes
************************************************************
Group 11.Initial field variables (PHIs)
FIINIT(P1)=0. ;FIINIT(V1)=0.
FIINIT(W1)=0. ;FIINIT(S140)=1.
FIINIT(S142)=1.0E-10 ;FIINIT(S145)=1.0E-10
FIINIT(S158)=1.0E-10 ;FIINIT(S80)=1.0E-10
FIINIT(SPHT)=1.0E-10 ;FIINIT(ENUL)=1.0E-10
FIINIT(BLOK)=1. ;FIINIT(PRPS)=-1.
FIINIT(DEPO)=1.0E-10 ;FIINIT(RHO1)=1.0E-10
FIINIT(GION)=1.0E-10 ;FIINIT(GAMM)=1.0E-10
FIINIT(PHIT)=1.0E-10 ;FIINIT(T0)=1.1E+04
FIINIT(NE)=1.0E-02 ;FIINIT(PHI2)=0.
FIINIT(PHI1)=100. ;FIINIT(TEM1)=300.

PATCH(CMP0 ,INIVAL, 1, 1, 1, 24, 1, 1, 1, 1)
INIT(CMP0 ,PRPS,0. ,199. )

PATCH(CMP1 ,INIVAL, 1, 1, 1, 15, 13, 19, 1, 1)
INIT(CMP1 ,PRPS,0. ,199. )
FSWEEP = 1
NAMFI =CHAM
************************************************************
Group 12. Patchwise adjustment of terms
Patches for this group are printed with those
for Group 13.
Their names begin either with GP12 or &
************************************************************
Group 13. Boundary & Special Sources

PATCH(VIN1 ,LOW , 1, 1, 25, 29, 1, 1, 1, 1)
COVAL(VIN1 ,P1 , FIXFLU ,10. )
COVAL(VIN1 ,W1 ,0. ,0.030376 )
COVAL(VIN1 ,S140,0. ,1. )
COVAL(VIN1 ,S142,0. ,0. )
COVAL(VIN1 ,S145,0. ,0. )
COVAL(VIN1 ,S158,0. ,0. )
COVAL(VIN1 ,S80 ,0. ,0. )
COVAL(VIN1 ,TEM1,0. ,300. )

PATCH(OUTLET ,HIGH , 1, 1, 16, 29, 19, 19, 1, 1)
COVAL(OUTLET ,P1 ,1. ,0. )
COVAL(OUTLET ,S142,0. , SAME )
COVAL(OUTLET ,S145,0. , SAME )
COVAL(OUTLET ,S158,0. , SAME )
COVAL(OUTLET ,S80 ,0. , SAME )
COVAL(OUTLET ,TEM1,0. , SAME )

PATCH(SUBS ,HIGH , 1, 1, 1, 15, 12, 12, 1, 1)
COVAL(SUBS ,NE , GRND7 ,0. )
COVAL(SUBS ,PHI2, FIXFLU , GRND7 )
COVAL(SUBS ,PHI1, FIXFLU , GRND7 )
COVAL(SUBS ,TEM1, FIXVAL ,533. )

PATCH(SUBS1 ,SOUTH , 1, 1, 16, 16, 13, 19, 1, 1)
COVAL(SUBS1 ,NE , GRND7 ,0. )
COVAL(SUBS1 ,PHI2, FIXFLU , GRND7 )
COVAL(SUBS1 ,PHI1, FIXFLU , GRND7 )

PATCH(WALL0 ,NWALL , 1, 1, 29, 29, 1, 19, 1, 1)
COVAL(WALL0 ,W1 ,1. ,0. )
COVAL(WALL0 ,TEM1,1. ,300. )

PATCH(WALL01 ,NORTH , 1, 1, 29, 29, 1, 19, 1, 1)
COVAL(WALL01 ,NE , GRND7 ,0. )
COVAL(WALL01 ,PHI2, FIXFLU , GRND7 )
COVAL(WALL01 ,PHI1, FIXFLU , GRND7 )

PATCH(ELEPBOT ,LWALL , 1, 1, 1, 24, 2, 2, 1, 1)
COVAL(ELEPBOT ,TEM1,1. ,300. )

PATCH(ELE1BOT ,LOW , 1, 1, 1, 15, 2, 2, 1, 1)
COVAL(ELE1BOT ,NE , GRND7 ,0. )
COVAL(ELE1BOT ,PHI2, FIXFLU , GRND7 )
COVAL(ELE1BOT ,PHI1, FIXFLU , GRND7 )

PATCH(ELRING ,LOW , 1, 1, 16, 24, 2, 2, 1, 1)
COVAL(ELRING ,NE , GRND7 ,0. )
COVAL(ELRING ,PHI2, FIXFLU , GRND7 )
COVAL(ELRING ,PHI1, FIXFLU , GRND7 )

PATCH(COOL ,VOLUME, 1, 1, 1, 29, 1, 19, 1, 1)
COVAL(COOL ,T0 , GRND7 , GRND7 )
COVAL(COOL ,NE , GRND7 , GRND7 )

PATCH(IONIZE ,VOLUME, 1, 1, 1, 29, 1, 19, 1, 1)
COVAL(IONIZE ,T0 , GRND7 , GRND7 )
COVAL(IONIZE ,NE , GRND7 , GRND7 )

PATCH(CHEM ,VOLUME, 1, 1, 1, 29, 1, 19, 1, 1)
COVAL(CHEM ,S142, GRND1 , GRND1 )
COVAL(CHEM ,S145, GRND1 , GRND1 )
COVAL(CHEM ,S158, GRND1 , GRND1 )
COVAL(CHEM ,S80 , GRND1 , GRND1 )
COVAL(CHEM ,TEM1, GRND1 , GRND1 )

PATCH(RELT ,PHASEM, 1, 1, 1, 29, 1, 19, 1, 1)
COVAL(RELT ,S142, GRND1 , SAME )
COVAL(RELT ,S145, GRND1 , SAME )
COVAL(RELT ,S158, GRND1 , SAME )
COVAL(RELT ,S80 , GRND1 , SAME )

PATCH(SURF1 ,HIGH , 1, 1, 1, 15, 12, 12, 1, 1)
COVAL(SURF1 ,P1 ,1. , GRND1 )
COVAL(SURF1 ,S142, FIXFLU , GRND1 )
COVAL(SURF1 ,S145, FIXFLU , GRND1 )
COVAL(SURF1 ,S158, FIXFLU , GRND1 )
COVAL(SURF1 ,S80 , FIXFLU , GRND1 )
COVAL(SURF1 ,TEM1, FIXFLU , GRND1 )
XCYCLE = F
EGWF = T
WALLCO = GRND2
************************************************************
Group 14. Downstream Pressure For PARAB
************************************************************
Group 15. Terminate Sweeps
LSWEEP = 300 ;ISWC1 = 1
LITHYD = 1 ;LITFLX = 1 ;LITC = 1 ;ITHC1 = 1
SELREF = T
RESFAC =1.0E-03
************************************************************
Group 16. Terminate Iterations
LITER(P1)=20 ;LITER(V1)=10
LITER(W1)=10 ;LITER(S142)=200
LITER(S145)=200 ;LITER(S158)=200
LITER(S80)=200 ;LITER(T0)=20
LITER(NE)=20 ;LITER(PHI2)=20
LITER(PHI1)=20 ;LITER(TEM1)=20
ENDIT(P1)=1.0E-03 ;ENDIT(V1)=1.0E-03
ENDIT(W1)=1.0E-03 ;ENDIT(S142)=1.0E-03
ENDIT(S145)=1.0E-03 ;ENDIT(S158)=1.0E-03
ENDIT(S80)=1.0E-03 ;ENDIT(T0)=1.0E-03
ENDIT(NE)=1.0E-03 ;ENDIT(PHI2)=1.0E-03
ENDIT(PHI1)=1.0E-03 ;ENDIT(TEM1)=1.0E-03
************************************************************
Group 17. Relaxation
RELAX(P1,LINRLX,0.3)
RELAX(V1,FALSDT,1.0E-04)
RELAX(W1,FALSDT,1.0E-04)
RELAX(S140,LINRLX,1.)
RELAX(S142,FALSDT,1.)
RELAX(S145,FALSDT,1.)
RELAX(S158,FALSDT,1.)
RELAX(S80,FALSDT,1.)
RELAX(SPHT,LINRLX,1.)
RELAX(ENUL,LINRLX,1.)
RELAX(BLOK,LINRLX,1.)
RELAX(PRPS,LINRLX,1.)
RELAX(DEPO,LINRLX,1.)
RELAX(RHO1,LINRLX,1.)
RELAX(GION,LINRLX,1.)
RELAX(GAMM,LINRLX,1.)
RELAX(PHIT,LINRLX,1.)
RELAX(T0,FALSDT,1.0E-08)
RELAX(NE,FALSDT,1.0E-08)
RELAX(PHI2,FALSDT,1.0E-06)
RELAX(PHI1,FALSDT,1.0E-06)
RELAX(TEM1,LINRLX,0.3)
OVRRLX =0.
EXPERT = F ;NNORSL = F
************************************************************
Group 18. Limits
VARMAX(P1)=1.0E+10 ;VARMIN(P1)=-8.
VARMAX(V1)=1.0E+06 ;VARMIN(V1)=-1.0E+06
VARMAX(W1)=1.0E+06 ;VARMIN(W1)=-1.0E+06
VARMAX(S140)=1. ;VARMIN(S140)=1.0E-20
VARMAX(S142)=1. ;VARMIN(S142)=1.0E-20
VARMAX(S145)=1. ;VARMIN(S145)=1.0E-20
VARMAX(S158)=1. ;VARMIN(S158)=1.0E-20
VARMAX(S80)=1. ;VARMIN(S80)=1.0E-20
VARMAX(SPHT)=1.0E+10 ;VARMIN(SPHT)=-1.0E+10
VARMAX(ENUL)=1.0E+10 ;VARMIN(ENUL)=-1.0E+10
VARMAX(BLOK)=1.0E+10 ;VARMIN(BLOK)=-1.0E+10
VARMAX(PRPS)=1.0E+10 ;VARMIN(PRPS)=-1.0E+10
VARMAX(DEPO)=1.0E+10 ;VARMIN(DEPO)=-1.0E+10
VARMAX(RHO1)=1.0E+10 ;VARMIN(RHO1)=-1.0E+10
VARMAX(GION)=1.0E+10 ;VARMIN(GION)=-1.0E+10
VARMAX(GAMM)=1.0E+10 ;VARMIN(GAMM)=-1.0E+10
VARMAX(PHIT)=1.0E+10 ;VARMIN(PHIT)=-1.0E+10
VARMAX(T0)=1.0E+10 ;VARMIN(T0)=-1.0E+10
VARMAX(NE)=1.0E+10 ;VARMIN(NE)=-1.0E+10
VARMAX(PHI2)=1.0E+10 ;VARMIN(PHI2)=-1.0E+10
VARMAX(PHI1)=1.0E+10 ;VARMIN(PHI1)=-1.0E+10
VARMAX(TEM1)=2000. ;VARMIN(TEM1)=260.
************************************************************
Group 19. Data transmitted to GROUND
NAMGRD =CVD
PARSOL = F
ISG62 = 1
CSG10   ='Q1'
SPEDAT(SET,DOMAIN,PHASE_1_MAT,I,70)
SPEDAT(SET,DOMAIN,PROPS_FILE_1,C,Q1)
SPEDAT(SET,CVD,MCDOPT,I,2)
SPEDAT(SET,CVD,BINOPT,I,4)
SPEDAT(SET,CVD,MCPROP,I,3)
SPEDAT(SET,CVD,CHMRLX,R,1.)
SPEDAT(SET,CVD,NGREAC,I,3)
SPEDAT(SET,CVD,GREAC(1),I,18)
SPEDAT(SET,CVD,GREAC(2),I,21)
SPEDAT(SET,CVD,GREAC(3),I,22)
SPEDAT(SET,CVD,NSREAC,I,2)
SPEDAT(SET,CVD,SREAC(1),I,19)
SPEDAT(SET,CVD,SREAC(2),I,20)
SPEDAT(SET,CVD,PHIPAR(1),R,2.)
SPEDAT(SET,CVD,PHIPAR(2),R,0.8)
SPEDAT(SET,CVD,PHIPAR(3),R,0.)
SPEDAT(SET,CVD,PHIPAR(4),R,200.)
SPEDAT(SET,CVD,NEPAR(1),R,18.)
SPEDAT(SET,CVD,NEPAR(2),R,5.0E+05)
SPEDAT(SET,CVD,NEPAR(3),R,3.0E+05)
SPEDAT(SET,CVD,NEPAR(4),R,1.3E+05)
SPEDAT(SET,CVD,NEPAR(5),R,0.18)
SPEDAT(SET,CVD,T0PAR(2),R,0.3)
SPEDAT(SET,CVD,T0PAR(1),R,3500.)
SPEDAT(SET,CVD,T0PAR(3),R,6.0E+05)
SPEDAT(SET,CVD,T0PAR(4),R,1.0E+04)
SPEDAT(SET,CVD,LNELIM,L,F)
SPEDAT(SET,GXMONI,PLOTALL,L,T)
SPEDAT(SET,MATERIAL,199,L,T)
************************************************************
Group 20. Preliminary Printout
************************************************************
Group 21. Print-out of Variables
INIFLD = F ;SUBWGR = F
* Y in OUTPUT argument list denotes:
* 1-field 2-correction-eq. monitor 3-selective dumping
* 4-whole-field residual 5-spot-value table 6-residual table
OUTPUT(P1,Y,N,Y,Y,Y,Y)
OUTPUT(V1,Y,N,Y,Y,Y,Y)
OUTPUT(W1,Y,N,Y,Y,Y,Y)
OUTPUT(S140,Y,N,Y,N,N,N)
OUTPUT(S142,Y,N,Y,Y,Y,Y)
OUTPUT(S145,Y,N,Y,Y,Y,Y)
OUTPUT(S158,Y,N,Y,Y,Y,Y)
OUTPUT(S80,Y,N,Y,Y,Y,Y)
OUTPUT(SPHT,Y,N,Y,N,N,N)
OUTPUT(ENUL,Y,N,Y,N,N,N)
OUTPUT(BLOK,Y,N,Y,N,N,N)
OUTPUT(PRPS,Y,N,Y,N,N,N)
OUTPUT(DEPO,Y,N,Y,N,N,N)
OUTPUT(RHO1,Y,N,Y,N,N,N)
OUTPUT(GION,Y,N,Y,N,N,N)
OUTPUT(GAMM,Y,N,Y,N,N,N)
OUTPUT(PHIT,Y,N,Y,N,N,N)
OUTPUT(T0,Y,N,Y,Y,Y,Y)
OUTPUT(NE,Y,N,Y,Y,Y,Y)
OUTPUT(PHI2,Y,N,Y,Y,Y,Y)
OUTPUT(PHI1,Y,N,Y,Y,Y,Y)
OUTPUT(TEM1,Y,N,Y,Y,Y,Y)
************************************************************
Group 22. Monitor Print-Out
IXMON = 1 ;IYMON = 1 ;IZMON = 12
NPRMON = 100000 ;NPRMNT = 1 ;TSTSWP = -1
UWATCH = T ;USTEER = T
HIGHLO = F
************************************************************
Group 23.Field Print-Out & Plot Control
NPRINT = 100000 ;NUMCLS = 5
NYPRIN = -1 ;IYPRF = 1 ;IYPRL = 10000
NZPRIN = -1 ;IZPRF = 1 ;IZPRL = 10000
XZPR = F ;YZPR = T
IPLTF = 1 ;IPLTL = -1 ;NPLT = -1
ISWPRF = 1 ;ISWPRL = 100000
ITABL = 3 ;IPROF = 1
ABSIZ =0.5 ;ORSIZ =0.4
NTZPRF = 1 ;NCOLPF = 50
ICHR = 2 ;NCOLCO = 45 ;NROWCO = 20
No PATCHes yet used for this Group
************************************************************
Group 24. Dumps For Restarts
SAVE = T ;NOWIPE = F
NSAVE =CHAM
STOP
```