TALK=T;RUN(1,1)
DISPLAY
This file simulates a simple chemical vapour deposition
reactor for depositing tungsten; the reactor is axisymmetric
and the geometry was provided by Siemens.
Laminar, steady-state flow is assumed.
The susceptor temperature is 733K.
------> Y
|
|
| Z
V
| OUTLET |**********************|
C| |**********************|
E| |**********************|
N| |***** BLOCKAGE *******|W
T| |**********************|A
R| |**********************|L
E| |______________________|L
| |
L| |
I| |
N| |W
E| |A
|***************************************| |L
|********************** BLOCKAGE *******| |L
|***************************************| |
|******* INLET *************************| |
| | | | | | | |*****| |W
| V V V V V V |*****| |A
| |*****| |L
| |*****| |L
| |*****| |
|___________________________ |*****| |
|****** SUSCEPTOR **********| |_____| |
|***************************| |
|______________________________________________|
FLOOR
ENDDIS
DISPLAY
This file simulates a simple chemical vapour deposition
reactor for depositing tungsten using a showerhead inlet
to obtain uniform flow; the reactor is axisymmetric and
the geometry was provided by Siemens.
Laminar, steady-state flow is assumed.
The susceptor temperature is 733K.
ENDDIS
************************************************************
Group 1. Run Title and Number
************************************************************
************************************************************
TEXT(Tungsten Reactor - showerhead inlet:D105)
************************************************************
************************************************************
IRUNN = 1 ;LIBREF = 104
************************************************************
Group 2. Time dependence
STEADY = T
************************************************************
Group 3. X-Direction Grid Spacing
CARTES = F
NX = 1
XULAST =0.1
XFRAC(1)=1.
************************************************************
Group 4. Y-Direction Grid Spacing
NY = 21
YVLAST =1.
Method of pairs used for grid setting.
YFRAC(1)=-7. ;YFRAC(2)=1.0E-02
YFRAC(3)=2. ;YFRAC(4)=9.0E-03
YFRAC(5)=2. ;YFRAC(6)=7.0E-03
YFRAC(7)=2. ;YFRAC(8)=7.5E-03
YFRAC(9)=2. ;YFRAC(10)=6.0E-03
YFRAC(11)=2. ;YFRAC(12)=9.0E-03
YFRAC(13)=4. ;YFRAC(14)=2.5E-03
************************************************************
Group 5. Z-Direction Grid Spacing
PARAB = F
NZ = 23
ZWLAST =1.
Method of pairs used for grid setting.
ZFRAC(1)=-5. ;ZFRAC(2)=1.0E-02
ZFRAC(3)=1. ;ZFRAC(4)=3.5E-03
ZFRAC(5)=4. ;ZFRAC(6)=1.0E-02
ZFRAC(7)=1. ;ZFRAC(8)=3.5E-03
ZFRAC(9)=2. ;ZFRAC(10)=1.0E-02
ZFRAC(11)=1. ;ZFRAC(12)=6.0E-03
ZFRAC(13)=6. ;ZFRAC(14)=5.333E-03
ZFRAC(15)=1. ;ZFRAC(16)=4.0E-03
ZFRAC(17)=2. ;ZFRAC(18)=5.0E-03
************************************************************
Group 6. Body-Fitted Coordinates
************************************************************
Group 7. Variables: STOREd,SOLVEd,NAMEd
ONEPHS = T
NAME(1)=P1 ;NAME(5)=V1
NAME(7)=W1 ;NAME(16)=S177
NAME(17)=S80 ;NAME(18)=S97
NAME(141)=ENUL ;NAME(142)=BLOK
NAME(143)=PRPS ;NAME(144)=DEPO
NAME(145)=SPHT ;NAME(146)=CNDT
NAME(147)=EMIS ;NAME(149)=RHO1
NAME(150)=TEM1
* Y in SOLUTN argument list denotes:
* 1-stored 2-solved 3-whole-field
* 4-point-by-point 5-explicit 6-harmonic averaging
SOLUTN(P1,Y,Y,Y,N,N,N)
SOLUTN(V1,Y,Y,N,N,N,Y)
SOLUTN(W1,Y,Y,N,N,N,Y)
SOLUTN(S177,Y,N,N,N,N,Y)
SOLUTN(S80,Y,Y,Y,N,N,Y)
SOLUTN(S97,Y,Y,Y,N,N,Y)
SOLUTN(ENUL,Y,N,N,N,N,Y)
SOLUTN(BLOK,Y,N,N,N,N,Y)
SOLUTN(PRPS,Y,N,N,N,N,Y)
SOLUTN(DEPO,Y,N,N,N,N,Y)
SOLUTN(SPHT,Y,N,N,N,N,Y)
SOLUTN(CNDT,Y,N,N,N,N,Y)
SOLUTN(EMIS,Y,N,N,N,N,Y)
SOLUTN(RHO1,Y,N,N,N,N,Y)
SOLUTN(TEM1,Y,Y,Y,N,N,Y)
DEN1 = 149
VISL = 141
IVARBK = -1 ;ISOLBK = 1
PRNITS= F ;OPTRLX= F ;NOSIP= F ;ALLVBC= F
DBSOLV= F ;IMPINI= F ;EARL1D= F
PRPS = 143
************************************************************
Group 8. Terms & Devices
* Y in TERMS argument list denotes:
* 1-built-in source 2-convection 3-diffusion 4-transient
* 5-first phase variable 6-interphase transport
TERMS(P1,Y,Y,Y,N,Y,Y)
TERMS(V1,Y,Y,Y,Y,Y,Y)
TERMS(W1,Y,Y,Y,Y,Y,Y)
TERMS(S80,N,Y,Y,Y,N,Y)
TERMS(S97,N,Y,Y,Y,Y,Y)
TERMS(TEM1,N,Y,Y,Y,Y,Y)
DIFCUT =0. ;ZDIFAC =1.
GALA = F ;ADDDIF = F
UDIFNE = T
USOURC = T
ISOLX = 0 ;ISOLY = 0 ;ISOLZ = 0
************************************************************
Group 9. Properties used if PRPS is not
stored, and where PRPS = -1.0 if it is!
RHO1 =1. ;TMP1 =0. ;EL1 =0.
TSURR =0. ;TEMP0 =0. ;PRESS0 =133.
DVO1DT =0. ;DRH1DP =0.
TMP1A =0.
EMISS =0. ;SCATT =0.
RADIA =0. ;RADIB =0.
ENUL =1.0E-05 ;ENUT =0.
PRNDTL(V1)=1. ;PRNDTL(W1)=1.
PRNDTL(S80)=-GRND8 ;PRNDTL(S97)=-GRND8
PRNDTL(TEM1)=1.
PRT(V1)=1. ;PRT(W1)=1.
PRT(S80)=1. ;PRT(S97)=1.
PRT(TEM1)=1.
CP1 =1. ;CP2 =1.
* List of user-defined materials to be read by EARTH
MATFLG=T;IMAT=2
* Name
*Ind. Dens. Viscos. Spec.heat Conduct. Expans. Compr.
*
70 GRND8 GRND8 GRND8 GRND8 1.000
* constants for GRND option no 1
0.0 0.0 0.0
* constants for GRND option no 2
0.0 0.0 0.0
* constants for GRND option no 3
0.0 0.0 0.0
* constants for GRND option no 4
0.0 0.0 0.0
*
154 1.926E4 1.0 134.0 178.0 0.0
************************************************************
Group 10.Inter-Phase Transfer Processes
************************************************************
Group 11.Initial field variables (PHIs)
FIINIT(P1)=0. ;FIINIT(V1)=0.
FIINIT(W1)=0. ;FIINIT(S177)=0.94
FIINIT(S80)=0.06 ;FIINIT(S97)=1.0E-10
FIINIT(ENUL)=1.0E-10 ;FIINIT(BLOK)=1.
FIINIT(PRPS)=70. ;FIINIT(DEPO)=1.0E-10
FIINIT(SPHT)=1.0E-10 ;FIINIT(CNDT)=1.0E-10
FIINIT(EMIS)=0. ;FIINIT(RHO1)=1.0E-10
FIINIT(TEM1)=293.
PATCH(BLK1 ,INIVAL, 1, 1, 1, 13, 21, 23, 1, 1)
INIT(BLK1 ,BLOK,0. ,2. )
INIT(BLK1 ,PRPS,0. ,154. )
PATCH(BLK2 ,INIVAL, 1, 1, 11, 21, 1, 5, 1, 1)
INIT(BLK2 ,PRPS,0. ,199. )
PATCH(BLK3 ,INIVAL, 1, 1, 1, 17, 12, 12, 1, 1)
INIT(BLK3 ,BLOK,0. ,3. )
INIT(BLK3 ,PRPS,0. ,111. )
PATCH(BLK4 ,INIVAL, 1, 1, 12, 17, 13, 13, 1, 1)
INIT(BLK4 ,BLOK,0. ,3. )
INIT(BLK4 ,PRPS,0. ,111. )
PATCH(BLK5 ,INIVAL, 1, 1, 1, 17, 14, 14, 1, 1)
INIT(BLK5 ,BLOK,0. ,3. )
INIT(BLK5 ,PRPS,0. ,111. )
PATCH(BLK6 ,INIVAL, 1, 1, 16, 17, 15, 21, 1, 1)
INIT(BLK6 ,BLOK,0. ,3. )
INIT(BLK6 ,PRPS,0. ,111. )
INIADD = F
FSWEEP = 1
NAMFI =CHAM
************************************************************
Group 12. Patchwise adjustment of terms
Patches for this group are printed with those
for Group 13.
Their names begin either with GP12 or &
************************************************************
Group 13. Boundary & Special Sources
PATCH(INLET ,LOW , 1, 1, 1, 11, 13, 13, 1, 1)
COVAL(INLET ,P1 , FIXFLU ,6.8595E-03 )
COVAL(INLET ,V1 ,0. ,0. )
COVAL(INLET ,W1 ,0. ,4.035 )
COVAL(INLET ,S177,0. ,0.94 )
COVAL(INLET ,S80 ,0. ,0.06 )
COVAL(INLET ,S97 ,0. ,0. )
COVAL(INLET ,TEM1,0. ,293. )
PATCH(OUT ,LOW , 1, 1, 1, 10, 1, 1, 1, 1)
COVAL(OUT ,P1 ,1000. ,0. )
COVAL(OUT ,V1 ,0. , SAME )
COVAL(OUT ,W1 ,0. , SAME )
COVAL(OUT ,S177,0. , SAME )
COVAL(OUT ,S80 ,0. , SAME )
COVAL(OUT ,S97 ,0. , SAME )
COVAL(OUT ,TEM1,0. , SAME )
PATCH(WAFER ,CELL , 1, 1, 1, 11, 21, 23, 1, 1)
COVAL(WAFER ,TEM1, FIXVAL ,733. )
PATCH(FLOOR ,HWALL , 1, 1, 14, 21, 23, 23, 1, 1)
COVAL(FLOOR ,V1 ,1. ,0. )
COVAL(FLOOR ,TEM1,1. ,328. )
PATCH(WALL ,NWALL , 1, 1, 21, 21, 6, 23, 1, 1)
COVAL(WALL ,W1 ,1. ,0. )
COVAL(WALL ,TEM1,1. ,328. )
PATCH(LBCKB ,LWALL , 1, 1, 11, 21, 6, 6, 1, 1)
COVAL(LBCKB ,TEM1,1. ,328. )
PATCH(LBCKL ,NWALL , 1, 1, 10, 10, 1, 5, 1, 1)
COVAL(LBCKL ,TEM1,1. ,328. )
PATCH(SURF1 ,HIGH , 1, 1, 1, 13, 20, 20, 1, 1)
COVAL(SURF1 ,P1 ,1. , GRND1 )
COVAL(SURF1 ,S80 , FIXFLU , GRND1 )
COVAL(SURF1 ,S97 , FIXFLU , GRND1 )
COVAL(SURF1 ,TEM1, FIXFLU , GRND1 )
PATCH(@RI001 ,LOW , 1, 1, 1, 13, 21, 21, 1, 1)
COVAL(@RI001 ,EMIS,154. ,733. )
COVAL(@RI001 ,TEM1, GRND1 , GRND1 )
PATCH(@RI002 ,NORTH , 1, 1, 13, 13, 21, 23, 1, 1)
COVAL(@RI002 ,EMIS,154. ,733. )
COVAL(@RI002 ,TEM1, GRND1 , GRND1 )
PATCH(@RI003 ,HIGH , 1, 1, 14, 21, 23, 23, 1, 1)
COVAL(@RI003 ,EMIS,111. ,328. )
COVAL(@RI003 ,TEM1,0. ,328. )
PATCH(@RI004 ,NORTH , 1, 1, 21, 21, 6, 23, 1, 1)
COVAL(@RI004 ,EMIS,111. ,328. )
COVAL(@RI004 ,TEM1,0. ,328. )
PATCH(@RI005 ,LOW , 1, 1, 11, 21, 6, 6, 1, 1)
COVAL(@RI005 ,EMIS,111. ,328. )
COVAL(@RI005 ,TEM1,0. ,328. )
PATCH(@RI006 ,NORTH , 1, 1, 10, 10, 1, 5, 1, 1)
COVAL(@RI006 ,EMIS,111. ,328. )
COVAL(@RI006 ,TEM1,0. ,328. )
PATCH(@RI007 ,LOW , 1, 1, 1, 10, 1, 1, 1, 1)
COVAL(@RI007 ,EMIS,111. ,300. )
COVAL(@RI007 ,TEM1,0. ,300. )
PATCH(@RI008 ,LOW , 1, 1, 1, 17, 12, 12, 1, 1)
COVAL(@RI008 ,EMIS,111. ,440. )
COVAL(@RI008 ,TEM1, GRND1 , GRND1 )
PATCH(@RI009 ,NORTH , 1, 1, 17, 17, 12, 21, 1, 1)
COVAL(@RI009 ,EMIS,111. ,440. )
COVAL(@RI009 ,TEM1, GRND1 , GRND1 )
PATCH(@RI010 ,HIGH , 1, 1, 16, 17, 21, 21, 1, 1)
COVAL(@RI010 ,EMIS,111. ,440. )
COVAL(@RI010 ,TEM1, GRND1 , GRND1 )
PATCH(@RI011 ,SOUTH , 1, 1, 16, 16, 15, 21, 1, 1)
COVAL(@RI011 ,EMIS,111. ,440. )
COVAL(@RI011 ,TEM1, GRND1 , GRND1 )
PATCH(@RI012 ,HIGH , 1, 1, 1, 15, 14, 14, 1, 1)
COVAL(@RI012 ,EMIS,111. ,440. )
COVAL(@RI012 ,TEM1, GRND1 , GRND1 )
PATCH(SHWR ,HIGH , 1, 1, 1, 11, 14, 14, 1, 1)
COVAL(SHWR ,P1 ,3.2E+04 , GRND7 )
COVAL(SHWR ,W1 ,0.5 , GRND7 )
COVAL(SHWR ,S177,0. , GRND7 )
COVAL(SHWR ,S80 ,0. , GRND7 )
COVAL(SHWR ,S97 ,0. , GRND7 )
COVAL(SHWR ,TEM1,0. , GRND7 )
PATCH(@RI013 ,LOW , 1, 1, 1, 11, 14, 14, 1, 1)
COVAL(@RI013 ,EMIS,111. ,440. )
COVAL(@RI013 ,TEM1, GRND1 , GRND1 )
PATCH(@RI014 ,HIGH , 1, 1, 1, 11, 12, 12, 1, 1)
COVAL(@RI014 ,EMIS,111. ,293. )
COVAL(@RI014 ,TEM1, GRND1 , GRND1 )
PATCH(@RI015 ,SOUTH , 1, 1, 12, 12, 13, 13, 1, 1)
COVAL(@RI015 ,EMIS,111. ,293. )
COVAL(@RI015 ,TEM1, GRND1 , GRND1 )
XCYCLE = F
EGWF = T
WALLCO = GRND2
************************************************************
Group 14. Downstream Pressure For PARAB
************************************************************
Group 15. Terminate Sweeps
LSWEEP = 200 ;ISWC1 = 1
LITHYD = 1 ;LITFLX = 1 ;LITC = 1 ;ITHC1 = 1
SELREF = T
RESFAC =1.0E-06
************************************************************
Group 16. Terminate Iterations
LITER(P1)=20 ;LITER(V1)=10
LITER(W1)=10 ;LITER(S80)=20
LITER(S97)=20 ;LITER(TEM1)=20
ENDIT(P1)=1.0E-03 ;ENDIT(V1)=1.0E-03
ENDIT(W1)=1.0E-03 ;ENDIT(S80)=1.0E-03
ENDIT(S97)=1.0E-03 ;ENDIT(TEM1)=1.0E-03
************************************************************
Group 17. Relaxation
RELAX(P1,LINRLX,1.)
RELAX(V1,FALSDT,1000.)
RELAX(W1,FALSDT,1000.)
RELAX(S177,LINRLX,1.)
RELAX(S80,FALSDT,100.)
RELAX(S97,FALSDT,100.)
RELAX(ENUL,LINRLX,1.)
RELAX(BLOK,LINRLX,1.)
RELAX(PRPS,LINRLX,1.)
RELAX(DEPO,LINRLX,1.)
RELAX(SPHT,LINRLX,1.)
RELAX(CNDT,LINRLX,1.)
RELAX(EMIS,LINRLX,1.)
RELAX(RHO1,LINRLX,1.)
RELAX(TEM1,LINRLX,0.7)
OVRRLX =0.
EXPERT = F ;NNORSL = F
************************************************************
Group 18. Limits
VARMAX(P1)=1.0E+10 ;VARMIN(P1)=-106.400002
VARMAX(V1)=1.0E+06 ;VARMIN(V1)=-1.0E+06
VARMAX(W1)=1.0E+06 ;VARMIN(W1)=-1.0E+06
VARMAX(S177)=1. ;VARMIN(S177)=1.0E-20
VARMAX(S80)=1. ;VARMIN(S80)=1.0E-20
VARMAX(S97)=1. ;VARMIN(S97)=1.0E-20
VARMAX(ENUL)=1.0E+10 ;VARMIN(ENUL)=-1.0E+10
VARMAX(BLOK)=1.0E+10 ;VARMIN(BLOK)=-1.0E+10
VARMAX(PRPS)=1.0E+10 ;VARMIN(PRPS)=-1.0E+10
VARMAX(DEPO)=1.0E+10 ;VARMIN(DEPO)=-1.0E+10
VARMAX(SPHT)=1.0E+10 ;VARMIN(SPHT)=-1.0E+10
VARMAX(CNDT)=1.0E+10 ;VARMIN(CNDT)=-1.0E+10
VARMAX(EMIS)=1.0E+10 ;VARMIN(EMIS)=-1.0E+10
VARMAX(RHO1)=1.0E+10 ;VARMIN(RHO1)=-1.0E+10
VARMAX(TEM1)=1000. ;VARMIN(TEM1)=293.
************************************************************
Group 19. Data transmitted to GROUND
NAMGRD =CVD
S2SR = T
PARSOL = F
ISG62 = 1
CSG10 ='q1'
SPEDAT(SET,CVD,MCDOPT,I,2)
SPEDAT(SET,CVD,BINOPT,I,4)
SPEDAT(SET,CVD,MCPROP,I,3)
SPEDAT(SET,CVD,CHMRLX,R,0.5)
SPEDAT(SET,CVD,NGREAC,I,0)
SPEDAT(SET,CVD,NSREAC,I,1)
SPEDAT(SET,CVD,SREAC(1),I,17)
SPEDAT(SET,CVD,RADCVD,L,T)
SPEDAT(SET,GXMONI,PLOTALL,L,T)
SPEDAT(SET,MATERIAL,70,L,T)
SPEDAT(SET,MATERIAL,154,L,T)
SPEDAT(SET,MATERIAL,199,L,T)
SPEDAT(SET,MATERIAL,111,L,T)
************************************************************
Group 20. Preliminary Printout
************************************************************
Group 21. Print-out of Variables
INIFLD = F ;SUBWGR = F
* Y in OUTPUT argument list denotes:
* 1-field 2-correction-eq. monitor 3-selective dumping
* 4-whole-field residual 5-spot-value table 6-residual table
OUTPUT(P1,Y,N,Y,Y,Y,Y)
OUTPUT(V1,Y,N,Y,Y,Y,Y)
OUTPUT(W1,Y,N,Y,Y,Y,Y)
OUTPUT(S177,Y,N,Y,N,N,N)
OUTPUT(S80,Y,N,Y,Y,Y,Y)
OUTPUT(S97,Y,N,Y,Y,Y,Y)
OUTPUT(ENUL,Y,N,Y,N,N,N)
OUTPUT(BLOK,Y,N,Y,N,N,N)
OUTPUT(PRPS,Y,N,Y,N,N,N)
OUTPUT(DEPO,Y,N,Y,N,N,N)
OUTPUT(SPHT,Y,N,Y,N,N,N)
OUTPUT(CNDT,Y,N,Y,N,N,N)
OUTPUT(EMIS,Y,N,Y,N,N,N)
OUTPUT(RHO1,Y,N,Y,N,N,N)
OUTPUT(TEM1,Y,N,Y,Y,Y,Y)
************************************************************
Group 22. Monitor Print-Out
IXMON = 1 ;IYMON = 12 ;IZMON = 19
NPRMON = 100000 ;NPRMNT = 1 ;TSTSWP = -1
UWATCH = T ;USTEER = T
HIGHLO = F
************************************************************
Group 23.Field Print-Out & Plot Control
NPRINT = 100000 ;NUMCLS = 5
NYPRIN = -1 ;IYPRF = 1 ;IYPRL = 10000
NZPRIN = -1 ;IZPRF = 1 ;IZPRL = 10000
XZPR = F ;YZPR = F
IPLTF = 1 ;IPLTL = -1 ;NPLT = -1
ISWPRF = 1 ;ISWPRL = 100000
ITABL = 3 ;IPROF = 1
ABSIZ =0.5 ;ORSIZ =0.4
NTZPRF = 1 ;NCOLPF = 50
ICHR = 2 ;NCOLCO = 45 ;NROWCO = 20
No PATCHes yet used for this Group
************************************************************
Group 24. Dumps For Restarts
SAVE = T ;NOWIPE = F
NSAVE =CHAM
STOP