TALK=T;RUN(1,1)
  DISPLAY
    This file simulates a simple chemical vapour deposition
    reactor for depositing tungsten; the reactor is axisymmetric
    and the geometry was provided by Siemens.
    Laminar, steady-state flow is assumed.
    The susceptor temperature is 733K.

         ------> Y
        |
        |
        | Z
        V

         |        OUTLET         |**********************|
        C|                       |**********************|
        E|                       |**********************|
        N|                       |***** BLOCKAGE *******|W
        T|                       |**********************|A
        R|                       |**********************|L
        E|                       |______________________|L
         |                                              |
        L|                                              |
        I|                                              |
        N|                                              |W
        E|                                              |A
         |***************************************|      |L
         |********************** BLOCKAGE *******|      |L
         |***************************************|      |
         |******* INLET *************************|      |
         | |   |   |   |   |   |           |*****|      |W
         | V   V   V   V   V   V           |*****|      |A
         |                                 |*****|      |L
         |                                 |*****|      |L
         |                                 |*****|      |
         |___________________________      |*****|      |
         |****** SUSCEPTOR **********|     |_____|      |
         |***************************|                  |
         |______________________________________________|
                                            FLOOR
  ENDDIS
 ************************************************************
  Group 1. Run Title and Number
 ************************************************************
 ************************************************************
 
 TEXT(Tungsten Reactor - normal inlet    :D104)
 
 ************************************************************
 ************************************************************
 
 IRUNN = 1 ;LIBREF = 14
 ************************************************************
  Group 2. Time dependence
 STEADY = T
 ************************************************************
  Group 3. X-Direction Grid Spacing
 CARTES = F
 NX = 1
 XULAST =0.1
 XFRAC(1)=1.
 ************************************************************
  Group 4. Y-Direction Grid Spacing
 NY = 21
 YVLAST =1.
   Method of pairs used for grid setting.
 YFRAC(1)=-7. ;YFRAC(2)=1.0E-02
 YFRAC(3)=2. ;YFRAC(4)=9.0E-03
 YFRAC(5)=2. ;YFRAC(6)=7.0E-03
 YFRAC(7)=2. ;YFRAC(8)=7.5E-03
 YFRAC(9)=2. ;YFRAC(10)=6.0E-03
 YFRAC(11)=2. ;YFRAC(12)=9.0E-03
 YFRAC(13)=4. ;YFRAC(14)=2.5E-03
 ************************************************************
  Group 5. Z-Direction Grid Spacing
 PARAB = F
 NZ = 23
 ZWLAST =1.
   Method of pairs used for grid setting.
 ZFRAC(1)=-5. ;ZFRAC(2)=1.0E-02
 ZFRAC(3)=1. ;ZFRAC(4)=3.5E-03
 ZFRAC(5)=4. ;ZFRAC(6)=1.0E-02
 ZFRAC(7)=1. ;ZFRAC(8)=3.5E-03
 ZFRAC(9)=2. ;ZFRAC(10)=1.0E-02
 ZFRAC(11)=1. ;ZFRAC(12)=6.0E-03
 ZFRAC(13)=6. ;ZFRAC(14)=5.333E-03
 ZFRAC(15)=1. ;ZFRAC(16)=4.0E-03
 ZFRAC(17)=2. ;ZFRAC(18)=5.0E-03
 ************************************************************
  Group 6. Body-Fitted Coordinates
 ************************************************************
  Group 7. Variables: STOREd,SOLVEd,NAMEd
 ONEPHS = T
 NAME(1)=P1 ;NAME(5)=V1
 NAME(7)=W1 ;NAME(16)=S177
 NAME(17)=S80 ;NAME(18)=S97
 NAME(141)=ENUL ;NAME(142)=BLOK
 NAME(143)=PRPS ;NAME(144)=DEPO
 NAME(145)=SPHT ;NAME(146)=CNDT
 NAME(147)=EMIS ;NAME(149)=RHO1
 NAME(150)=TEM1
    * Y in SOLUTN argument list denotes:
    * 1-stored 2-solved 3-whole-field
    * 4-point-by-point 5-explicit 6-harmonic averaging 
 SOLUTN(P1,Y,Y,Y,N,N,N)
 SOLUTN(V1,Y,Y,N,N,N,Y)
 SOLUTN(W1,Y,Y,N,N,N,Y)
 SOLUTN(S177,Y,N,N,N,N,Y)
 SOLUTN(S80,Y,Y,Y,N,N,Y)
 SOLUTN(S97,Y,Y,Y,N,N,Y)
 SOLUTN(ENUL,Y,N,N,N,N,Y)
 SOLUTN(BLOK,Y,N,N,N,N,Y)
 SOLUTN(PRPS,Y,N,N,N,N,Y)
 SOLUTN(DEPO,Y,N,N,N,N,Y)
 SOLUTN(SPHT,Y,N,N,N,N,Y)
 SOLUTN(CNDT,Y,N,N,N,N,Y)
 SOLUTN(EMIS,Y,N,N,N,N,Y)
 SOLUTN(RHO1,Y,N,N,N,N,Y)
 SOLUTN(TEM1,Y,Y,Y,N,N,Y)
 DEN1 = 149
 VISL = 141
 IVARBK = -1 ;ISOLBK = 1
 PRNITS= F ;OPTRLX= F ;NOSIP= F ;ALLVBC= F
 DBSOLV= F ;IMPINI= F ;EARL1D= F
 PRPS = 143
 ************************************************************
  Group 8. Terms & Devices
    * Y in TERMS argument list denotes:
    * 1-built-in source 2-convection 3-diffusion 4-transient
    * 5-first phase variable 6-interphase transport         
 TERMS(P1,Y,Y,Y,N,Y,Y)
 TERMS(V1,Y,Y,Y,Y,Y,Y)
 TERMS(W1,Y,Y,Y,Y,Y,Y)
 TERMS(S80,N,Y,Y,Y,N,Y)
 TERMS(S97,N,Y,Y,Y,Y,Y)
 TERMS(TEM1,N,Y,Y,Y,Y,Y)
 DIFCUT =0. ;ZDIFAC =1.
 GALA = F ;ADDDIF = F
 UDIFNE = T
 USOURC = T
 ISOLX = 0 ;ISOLY = 0 ;ISOLZ = 0
 ************************************************************
  Group 9. Properties used if PRPS is not
  stored, and where PRPS = -1.0 if it is!
 RHO1 =1. ;TMP1 =0.
 EL1 =0.
 TSURR =0. ;TEMP0 =0.
 PRESS0 =133.
 DVO1DT =0. ;DRH1DP =0.
 EMISS =0. ;SCATT =0.
 RADIA =0. ;RADIB =0.
 ENUL =1.0E-05 ;ENUT =0.
 PRNDTL(V1)=1. ;PRNDTL(W1)=1.
 PRNDTL(S80)=-GRND8 ;PRNDTL(S97)=-GRND8
 PRNDTL(TEM1)=1.
 PRT(V1)=1. ;PRT(W1)=1.
 PRT(S80)=1. ;PRT(S97)=1.
 PRT(TEM1)=1.
 CP1 =1. ;CP2 =1.
   *  List of user-defined materials to be read by EARTH
    MATFLG=T;IMAT=2   
   *  Name
   *Ind. Dens.  Viscos.  Spec.heat  Conduct.  Expans.  Compr.
   *  
    70 GRND8 GRND8 GRND8 GRND8 1.000
   *       constants for GRND option no 1
    0.0 0.0 0.0
   *       constants for GRND option no 2
    0.0 0.0 0.0
   *       constants for GRND option no 3
    0.0 0.0 0.0
   *       constants for GRND option no 4
    0.0 0.0 0.0
   *  
    154 1.926E4 1.0 134.0 178.0 0.0
 ************************************************************
  Group 10.Inter-Phase Transfer Processes
 ************************************************************
  Group 11.Initial field variables (PHIs)
 FIINIT(P1)=0. ;FIINIT(V1)=0.
 FIINIT(W1)=0. ;FIINIT(S177)=0.94
 FIINIT(S80)=0.06 ;FIINIT(S97)=1.0E-10
 FIINIT(ENUL)=1.0E-10 ;FIINIT(BLOK)=1.
 FIINIT(PRPS)=70. ;FIINIT(DEPO)=1.0E-10
 FIINIT(SPHT)=1.0E-10 ;FIINIT(CNDT)=1.0E-10
 FIINIT(EMIS)=0. ;FIINIT(RHO1)=1.0E-10
 FIINIT(TEM1)=293.
 
 PATCH(BLK1 ,INIVAL, 1, 1, 1, 13, 21, 23, 1, 1)
 INIT(BLK1 ,BLOK,0. ,2. )
 INIT(BLK1 ,PRPS,0. ,154. )
 
 PATCH(BLK2 ,INIVAL, 1, 1, 11, 21, 1, 5, 1, 1)
 INIT(BLK2 ,PRPS,0. ,199. )
 
 PATCH(BLK3 ,INIVAL, 1, 1, 1, 17, 12, 14, 1, 1)
 INIT(BLK3 ,BLOK,0. ,3. )
 INIT(BLK3 ,PRPS,0. ,111. )
 
 PATCH(BLK4 ,INIVAL, 1, 1, 16, 17, 15, 21, 1, 1)
 INIT(BLK4 ,BLOK,0. ,3. )
 INIT(BLK4 ,PRPS,0. ,111. )
 INIADD = F
 FSWEEP = 1
 NAMFI =CHAM
 ************************************************************
  Group 12. Patchwise adjustment of terms
  Patches for this group are printed with those
  for Group 13.
  Their names begin either with GP12 or &
 ************************************************************
  Group 13. Boundary & Special Sources
 
 PATCH(INLET ,LOW , 1, 1, 1, 11, 15, 15, 1, 1)
 COVAL(INLET ,P1 , FIXFLU ,6.8595E-03 )
 COVAL(INLET ,V1 ,0. ,0. )
 COVAL(INLET ,W1 ,0. ,4.035 )
 COVAL(INLET ,S177,0. ,0.94 )
 COVAL(INLET ,S80 ,0. ,0.06 )
 COVAL(INLET ,S97 ,0. ,0. )
 COVAL(INLET ,TEM1,0. ,293. )
 
 PATCH(OUT ,LOW , 1, 1, 1, 10, 1, 1, 1, 1)
 COVAL(OUT ,P1 ,1000. ,0. )
 COVAL(OUT ,V1 ,0. , SAME )
 COVAL(OUT ,W1 ,0. , SAME )
 COVAL(OUT ,S177,0. , SAME )
 COVAL(OUT ,S80 ,0. , SAME )
 COVAL(OUT ,S97 ,0. , SAME )
 COVAL(OUT ,TEM1,0. , SAME )
 
 PATCH(WAFER ,CELL , 1, 1, 1, 11, 21, 23, 1, 1)
 COVAL(WAFER ,TEM1, FIXVAL ,733. )
 
 PATCH(FLOOR ,HWALL , 1, 1, 14, 21, 23, 23, 1, 1)
 COVAL(FLOOR ,V1 ,1. ,0. )
 COVAL(FLOOR ,TEM1,1. ,328. )
 
 PATCH(WALL ,NWALL , 1, 1, 21, 21, 6, 23, 1, 1)
 COVAL(WALL ,W1 ,1. ,0. )
 COVAL(WALL ,TEM1,1. ,328. )
 
 PATCH(LBCKB ,LWALL , 1, 1, 11, 21, 6, 6, 1, 1)
 COVAL(LBCKB ,TEM1,1. ,328. )
 
 PATCH(LBCKL ,NWALL , 1, 1, 10, 10, 1, 5, 1, 1)
 COVAL(LBCKL ,TEM1,1. ,328. )
 
 PATCH(SURF1 ,HIGH , 1, 1, 1, 13, 20, 20, 1, 1)
 COVAL(SURF1 ,P1 ,1. , GRND1 )
 COVAL(SURF1 ,S80 , FIXFLU , GRND1 )
 COVAL(SURF1 ,S97 , FIXFLU , GRND1 )
 COVAL(SURF1 ,TEM1, FIXFLU , GRND1 )
 
 PATCH(@RI001 ,LOW , 1, 1, 1, 13, 21, 21, 1, 1)
 COVAL(@RI001 ,EMIS,154. ,733. )
 COVAL(@RI001 ,TEM1, GRND1 , GRND1 )
 
 PATCH(@RI002 ,NORTH , 1, 1, 13, 13, 21, 23, 1, 1)
 COVAL(@RI002 ,EMIS,154. ,733. )
 COVAL(@RI002 ,TEM1, GRND1 , GRND1 )
 
 PATCH(@RI003 ,HIGH , 1, 1, 14, 21, 23, 23, 1, 1)
 COVAL(@RI003 ,EMIS,111. ,328. )
 COVAL(@RI003 ,TEM1,0. ,328. )
 
 PATCH(@RI004 ,NORTH , 1, 1, 21, 21, 6, 23, 1, 1)
 COVAL(@RI004 ,EMIS,111. ,328. )
 COVAL(@RI004 ,TEM1,0. ,328. )
 
 PATCH(@RI005 ,LOW , 1, 1, 11, 21, 6, 6, 1, 1)
 COVAL(@RI005 ,EMIS,111. ,328. )
 COVAL(@RI005 ,TEM1,0. ,328. )
 
 PATCH(@RI006 ,NORTH , 1, 1, 10, 10, 1, 5, 1, 1)
 COVAL(@RI006 ,EMIS,111. ,328. )
 COVAL(@RI006 ,TEM1,0. ,328. )
 
 PATCH(@RI007 ,LOW , 1, 1, 1, 10, 1, 1, 1, 1)
 COVAL(@RI007 ,EMIS,111. ,300. )
 COVAL(@RI007 ,TEM1,0. ,300. )
 
 PATCH(@RI008 ,LOW , 1, 1, 1, 17, 12, 12, 1, 1)
 COVAL(@RI008 ,EMIS,111. ,440. )
 COVAL(@RI008 ,TEM1, GRND1 , GRND1 )
 
 PATCH(@RI009 ,NORTH , 1, 1, 17, 17, 12, 21, 1, 1)
 COVAL(@RI009 ,EMIS,111. ,440. )
 COVAL(@RI009 ,TEM1, GRND1 , GRND1 )
 
 PATCH(@RI010 ,HIGH , 1, 1, 16, 17, 21, 21, 1, 1)
 COVAL(@RI010 ,EMIS,111. ,440. )
 COVAL(@RI010 ,TEM1, GRND1 , GRND1 )
 
 PATCH(@RI011 ,SOUTH , 1, 1, 16, 16, 15, 21, 1, 1)
 COVAL(@RI011 ,EMIS,111. ,440. )
 COVAL(@RI011 ,TEM1, GRND1 , GRND1 )
 
 PATCH(@RI012 ,HIGH , 1, 1, 1, 15, 14, 14, 1, 1)
 COVAL(@RI012 ,EMIS,111. ,440. )
 COVAL(@RI012 ,TEM1, GRND1 , GRND1 )
 XCYCLE = F
 EGWF = T
 WALLCO = GRND2
 ************************************************************
  Group 14. Downstream Pressure For PARAB
 ************************************************************
  Group 15. Terminate Sweeps
 LSWEEP = 200 ;ISWC1 = 1
 LITHYD = 1 ;LITFLX = 1 ;LITC = 1 ;ITHC1 = 1
 SELREF = T
 RESFAC =1.0E-06
 ************************************************************
  Group 16. Terminate Iterations
 LITER(P1)=20 ;LITER(V1)=10
 LITER(W1)=10 ;LITER(S80)=20
 LITER(S97)=20 ;LITER(TEM1)=20
 ENDIT(P1)=1.0E-03 ;ENDIT(V1)=1.0E-03
 ENDIT(W1)=1.0E-03 ;ENDIT(S80)=1.0E-03
 ENDIT(S97)=1.0E-03 ;ENDIT(TEM1)=1.0E-03
 ************************************************************
  Group 17. Relaxation
 RELAX(P1,LINRLX,1.)
 RELAX(V1,FALSDT,1000.)
 RELAX(W1,FALSDT,1000.)
 RELAX(S177,LINRLX,1.)
 RELAX(S80,FALSDT,100.)
 RELAX(S97,FALSDT,100.)
 RELAX(ENUL,LINRLX,1.)
 RELAX(BLOK,LINRLX,1.)
 RELAX(PRPS,LINRLX,1.)
 RELAX(DEPO,LINRLX,1.)
 RELAX(SPHT,LINRLX,1.)
 RELAX(CNDT,LINRLX,1.)
 RELAX(EMIS,LINRLX,1.)
 RELAX(RHO1,LINRLX,1.)
 RELAX(TEM1,LINRLX,0.7)
 OVRRLX =0.
 EXPERT = F ;NNORSL = F
 ************************************************************
  Group 18. Limits
 VARMAX(P1)=1.0E+10 ;VARMIN(P1)=-106.400002
 VARMAX(V1)=1.0E+06 ;VARMIN(V1)=-1.0E+06
 VARMAX(W1)=1.0E+06 ;VARMIN(W1)=-1.0E+06
 VARMAX(S177)=1. ;VARMIN(S177)=1.0E-20
 VARMAX(S80)=1. ;VARMIN(S80)=1.0E-20
 VARMAX(S97)=1. ;VARMIN(S97)=1.0E-20
 VARMAX(ENUL)=1.0E+10 ;VARMIN(ENUL)=-1.0E+10
 VARMAX(BLOK)=1.0E+10 ;VARMIN(BLOK)=-1.0E+10
 VARMAX(PRPS)=1.0E+10 ;VARMIN(PRPS)=-1.0E+10
 VARMAX(DEPO)=1.0E+10 ;VARMIN(DEPO)=-1.0E+10
 VARMAX(SPHT)=1.0E+10 ;VARMIN(SPHT)=-1.0E+10
 VARMAX(CNDT)=1.0E+10 ;VARMIN(CNDT)=-1.0E+10
 VARMAX(EMIS)=1.0E+10 ;VARMIN(EMIS)=-1.0E+10
 VARMAX(RHO1)=1.0E+10 ;VARMIN(RHO1)=-1.0E+10
 VARMAX(TEM1)=1000. ;VARMIN(TEM1)=293.
 ************************************************************
  Group 19. Data transmitted to GROUND
 NAMGRD =CVD
 S2SR = T
 PARSOL = F
 ISG62 = 1
 CSG10   ='q1'
 SPEDAT(SET,CVD,MCDOPT,I,2)
 SPEDAT(SET,CVD,BINOPT,I,4)
 SPEDAT(SET,CVD,MCPROP,I,3)
 SPEDAT(SET,CVD,CHMRLX,R,0.5)
 SPEDAT(SET,CVD,NGREAC,I,0)
 SPEDAT(SET,CVD,NSREAC,I,1)
 SPEDAT(SET,CVD,SREAC(1),I,17)
 SPEDAT(SET,CVD,RADCVD,L,T)
 SPEDAT(SET,GXMONI,PLOTALL,L,T)
 SPEDAT(SET,MATERIAL,70,L,T)
 SPEDAT(SET,MATERIAL,154,L,T)
 SPEDAT(SET,MATERIAL,199,L,T)
 SPEDAT(SET,MATERIAL,111,L,T)
 ************************************************************
  Group 20. Preliminary Printout
 ************************************************************
  Group 21. Print-out of Variables
 INIFLD = F ;SUBWGR = F
    * Y in OUTPUT argument list denotes:
    * 1-field 2-correction-eq. monitor 3-selective dumping      
    * 4-whole-field residual 5-spot-value table 6-residual table
 OUTPUT(P1,Y,N,Y,Y,Y,Y)
 OUTPUT(V1,Y,N,Y,Y,Y,Y)
 OUTPUT(W1,Y,N,Y,Y,Y,Y)
 OUTPUT(S177,Y,N,Y,N,N,N)
 OUTPUT(S80,Y,N,Y,Y,Y,Y)
 OUTPUT(S97,Y,N,Y,Y,Y,Y)
 OUTPUT(ENUL,Y,N,Y,N,N,N)
 OUTPUT(BLOK,Y,N,Y,N,N,N)
 OUTPUT(PRPS,Y,N,Y,N,N,N)
 OUTPUT(DEPO,Y,N,Y,N,N,N)
 OUTPUT(SPHT,Y,N,Y,N,N,N)
 OUTPUT(CNDT,Y,N,Y,N,N,N)
 OUTPUT(EMIS,Y,N,Y,N,N,N)
 OUTPUT(RHO1,Y,N,Y,N,N,N)
 OUTPUT(TEM1,Y,N,Y,Y,Y,Y)
 ************************************************************
  Group 22. Monitor Print-Out
 IXMON = 1 ;IYMON = 12 ;IZMON = 19
 NPRMON = 100000 ;NPRMNT = 1 ;TSTSWP = -1
 UWATCH = T ;USTEER = T
 HIGHLO = F
 ************************************************************
  Group 23.Field Print-Out & Plot Control
 NPRINT = 100000 ;NUMCLS = 5
 NYPRIN = -1 ;IYPRF = 1 ;IYPRL = 10000
 NZPRIN = -1 ;IZPRF = 1 ;IZPRL = 10000
 XZPR = F ;YZPR = F
 IPLTF = 1 ;IPLTL = -1 ;NPLT = -1
 ISWPRF = 1 ;ISWPRL = 100000
 ITABL = 3 ;IPROF = 1
 ABSIZ =0.5 ;ORSIZ =0.4
 NTZPRF = 1 ;NCOLPF = 50
 ICHR = 2 ;NCOLCO = 45 ;NROWCO = 20
   No PATCHes yet used for this Group
 ************************************************************
  Group 24. Dumps For Restarts
 SAVE = T ;NOWIPE = F
 NSAVE =CHAM
STOP