TALK=T;RUN(1,1) DISPLAY This q1 file simulates an ASM single wafer chemical vapour deposition reactor using Wilke diffusion and Langmuir-Hinshelwood Si3N4 chemistry; the reactor is axisymmetric and the geometry was provided by TU Delft. Laminar, steady-state flow is assumed. ENDDIS ************************************************************ Group 1. Run Title and Number ************************************************************ ************************************************************ TEXT(ASM Single Wafer Si3N4 Reactor :D103) ************************************************************ ************************************************************ IRUNN = 1 ;LIBREF = 14 ************************************************************ Group 2. Time dependence STEADY = T ************************************************************ Group 3. X-Direction Grid Spacing CARTES = F NX = 1 XULAST =1.0E-02 XFRAC(1)=1. ************************************************************ Group 4. Y-Direction Grid Spacing NY = 18 YVLAST =0.21 YFRAC(1)=0.047619 ;YFRAC(2)=0.095238 YFRAC(3)=0.142857 ;YFRAC(4)=0.190476 YFRAC(5)=0.238095 ;YFRAC(6)=0.285714 YFRAC(7)=0.333333 ;YFRAC(8)=0.380952 YFRAC(9)=0.428571 ;YFRAC(10)=0.47619 YFRAC(11)=0.5 ;YFRAC(12)=0.571429 YFRAC(13)=0.654762 ;YFRAC(14)=0.738095 YFRAC(15)=0.803571 ;YFRAC(16)=0.869048 YFRAC(17)=0.934524 ;YFRAC(18)=1. ************************************************************ Group 5. Z-Direction Grid Spacing PARAB = F NZ = 26 ZWLAST =0.34 ZFRAC(1)=0.058824 ;ZFRAC(2)=0.117647 ZFRAC(3)=0.176471 ;ZFRAC(4)=0.235294 ZFRAC(5)=0.294118 ;ZFRAC(6)=0.352941 ZFRAC(7)=0.411765 ;ZFRAC(8)=0.439468 ZFRAC(9)=0.466671 ;ZFRAC(10)=0.493335 ZFRAC(11)=0.519411 ;ZFRAC(12)=0.544843 ZFRAC(13)=0.569555 ;ZFRAC(14)=0.593455 ZFRAC(15)=0.616411 ;ZFRAC(16)=0.638238 ZFRAC(17)=0.658633 ;ZFRAC(18)=0.677011 ZFRAC(19)=0.691176 ;ZFRAC(20)=0.705882 ZFRAC(21)=0.750392 ;ZFRAC(22)=0.795808 ZFRAC(23)=0.842386 ;ZFRAC(24)=0.890576 ZFRAC(25)=0.941361 ;ZFRAC(26)=1. ************************************************************ Group 6. Body-Fitted Coordinates ************************************************************ Group 7. Variables: STOREd,SOLVEd,NAMEd ONEPHS = T NAME(1)=P1 ;NAME(5)=V1 NAME(7)=W1 ;NAME(16)=S226 NAME(17)=S125 ;NAME(18)=S227 NAME(19)=S80 ;NAME(20)=S174 NAME(21)=S116 ;NAME(141)=ENUL NAME(142)=BLOK ;NAME(143)=PRPS NAME(144)=DEPO ;NAME(145)=SPHT NAME(146)=CNDT ;NAME(147)=EMIS NAME(149)=RHO1 ;NAME(150)=TEM1 * Y in SOLUTN argument list denotes: * 1-stored 2-solved 3-whole-field * 4-point-by-point 5-explicit 6-harmonic averaging SOLUTN(P1,Y,Y,Y,N,N,N) SOLUTN(V1,Y,Y,N,N,N,Y) SOLUTN(W1,Y,Y,N,N,N,Y) SOLUTN(S226,Y,N,N,N,N,Y) SOLUTN(S125,Y,Y,Y,N,N,Y) SOLUTN(S227,Y,Y,Y,N,N,Y) SOLUTN(S80,Y,Y,Y,N,N,Y) SOLUTN(S174,Y,Y,Y,N,N,Y) SOLUTN(S116,Y,Y,Y,N,N,Y) SOLUTN(ENUL,Y,N,N,N,N,Y) SOLUTN(BLOK,Y,N,N,N,N,Y) SOLUTN(PRPS,Y,N,N,N,N,Y) SOLUTN(DEPO,Y,N,N,N,N,Y) SOLUTN(SPHT,Y,N,N,N,N,Y) SOLUTN(CNDT,Y,N,N,N,N,Y) SOLUTN(EMIS,Y,N,N,N,N,Y) SOLUTN(RHO1,Y,N,N,N,N,Y) SOLUTN(TEM1,Y,Y,Y,N,N,Y) DEN1 = 149 VISL = 141 IVARBK = -1 ;ISOLBK = 1 PRNITS= F ;OPTRLX= F ;NOSIP= F ;ALLVBC= F DBSOLV= F ;IMPINI= F ;EARL1D= F PRPS = 143 ************************************************************ Group 8. Terms & Devices * Y in TERMS argument list denotes: * 1-built-in source 2-convection 3-diffusion 4-transient * 5-first phase variable 6-interphase transport TERMS(P1,Y,Y,Y,N,Y,Y) TERMS(V1,Y,Y,Y,Y,Y,Y) TERMS(W1,Y,Y,Y,Y,Y,Y) TERMS(S125,N,Y,Y,Y,N,Y) TERMS(S227,N,Y,Y,Y,Y,Y) TERMS(S80,N,Y,Y,Y,N,Y) TERMS(S174,N,Y,Y,Y,Y,Y) TERMS(S116,N,Y,Y,Y,N,Y) TERMS(TEM1,N,Y,Y,Y,Y,Y) DIFCUT =0. ;ZDIFAC =1. GALA = F ;ADDDIF = F NEWRH1 = T NEWENL = T UDIFNE = T USOURC = T ISOLX = 0 ;ISOLY = 0 ;ISOLZ = 0 ************************************************************ Group 9. Properties used if PRPS is not stored, and where PRPS = -1.0 if it is! RHO1 = GRND8 ;TMP1 =0. ;EL1 =0. TSURR =0. ;TEMP0 =0. ;PRESS0 =133. DVO1DT =1. ;DRH1DP =0. RHO1A =0. ;RHO1B =0. ;RHO1C =0. TMP1A =0. EMISS =0. ;SCATT =0. RADIA =0. ;RADIB =0. ENUL = GRND8 ;ENUT =0. ENULA =0. ;ENULB =0. ;ENULC =0. ;ENULD =0. ENULE =0. ;ENULF =0. ;ENULG =0. IENULA = 0 ;IENULB = 0 PRNDTL(V1)=1. ;PRNDTL(W1)=1. PRNDTL(S125)=-GRND8 ;PRNDTL(S227)=-GRND8 PRNDTL(S80)=-GRND8 ;PRNDTL(S174)=-GRND8 PRNDTL(S116)=-GRND8 ;PRNDTL(TEM1)=-GRND8 PRLH1A =0. ;PRLH1B =0. ;PRLH1C =0. PRT(V1)=1. ;PRT(W1)=1. PRT(S125)=1. ;PRT(S227)=1. PRT(S80)=1. ;PRT(S174)=1. PRT(S116)=1. ;PRT(TEM1)=1. CP1 = GRND8 ;CP2 =1. CP1A =0. ;CP1B =0. ;CP1C =0. ;CP1D =0. * List of user-defined materials to be read by EARTH MATFLG=T;IMAT=1 * Name *Ind. Dens. Viscos. Spec.heat Conduct. Expans. Compr. *70 GRND8 GRND8 GRND8 GRND8 1.000 * constants for GRND option no 1 0.0 0.0 0.0 * constants for GRND option no 2 0.0 0.0 0.0 * constants for GRND option no 3 0.0 0.0 0.0 * constants for GRND option no 4 0.0 0.0 0.0 ************************************************************ Group 10.Inter-Phase Transfer Processes ************************************************************ Group 11.Initial field variables (PHIs) FIINIT(P1)=0. ;FIINIT(V1)=0. FIINIT(W1)=0. ;FIINIT(S226)=0.887 FIINIT(S125)=0.113 ;FIINIT(S227)=1.0E-10 FIINIT(S80)=1.0E-10 ;FIINIT(S174)=1.0E-10 FIINIT(S116)=1.0E-10 ;FIINIT(ENUL)=1.0E-10 FIINIT(BLOK)=1. ;FIINIT(PRPS)=-1. FIINIT(DEPO)=1.0E-10 ;FIINIT(SPHT)=1.0E-10 FIINIT(CNDT)=1.0E-10 ;FIINIT(EMIS)=0. FIINIT(RHO1)=1.0E-10 ;FIINIT(TEM1)=290. PATCH(WAL1 ,INIVAL, 1, 1, 1, 12, 20, 20, 1, 1) INIT(WAL1 ,BLOK,0. ,2. ) INIT(WAL1 ,PRPS,0. ,111. ) PATCH(WAL2 ,INIVAL, 1, 1, 11, 18, 1, 5, 1, 1) INIT(WAL2 ,PRPS,0. ,198. ) PATCH(WAL3 ,INIVAL, 1, 1, 11, 11, 6, 7, 1, 1) INIT(WAL3 ,BLOK,0. ,4. ) INIT(WAL3 ,PRPS,0. ,111. ) PATCH(WAL4 ,INIVAL, 1, 1, 1, 14, 21, 26, 1, 1) INIT(WAL4 ,PRPS,0. ,198. ) INIADD = F FSWEEP = 1 NAMFI =CHAM ************************************************************ Group 12. Patchwise adjustment of terms Patches for this group are printed with those for Group 13. Their names begin either with GP12 or & ************************************************************ Group 13. Boundary & Special Sources PATCH(INLET ,LOW , 1, 1, 1, 10, 1, 1, 1, 1) COVAL(INLET ,P1 , FIXFLU ,2.069583E-04 ) COVAL(INLET ,V1 ,0. ,0. ) COVAL(INLET ,W1 ,0. ,0.103805 ) COVAL(INLET ,S226,0. ,0. ) COVAL(INLET ,S125,0. ,0.359408 ) COVAL(INLET ,S227,0. ,0. ) COVAL(INLET ,S80 ,0. ,0. ) COVAL(INLET ,S174,0. ,0. ) COVAL(INLET ,S116,0. ,0. ) COVAL(INLET ,TEM1,0. ,290. ) PATCH(OUT ,HIGH , 1, 1, 15, 18, 26, 26, 1, 1) COVAL(OUT ,P1 ,1000. ,0. ) COVAL(OUT ,V1 ,0. , SAME ) COVAL(OUT ,W1 ,0. , SAME ) COVAL(OUT ,S226,0. , SAME ) COVAL(OUT ,S125,0. , SAME ) COVAL(OUT ,S227,0. , SAME ) COVAL(OUT ,S80 ,0. , SAME ) COVAL(OUT ,S174,0. , SAME ) COVAL(OUT ,S116,0. , SAME ) COVAL(OUT ,TEM1,0. , SAME ) PATCH(WAFER ,CELL , 1, 1, 1, 12, 20, 20, 1, 1) COVAL(WAFER ,TEM1, FIXVAL ,1043. ) PATCH(DOME ,HWALL , 1, 1, 13, 14, 20, 20, 1, 1) COVAL(DOME ,TEM1,1. ,290. ) PATCH(WAND1 ,SWALL , 1, 1, 15, 15, 21, 26, 1, 1) COVAL(WAND1 ,TEM1,1. ,290. ) PATCH(WAND2 ,NWALL , 1, 1, 18, 18, 6, 26, 1, 1) COVAL(WAND2 ,W1 ,1. ,0. ) COVAL(WAND2 ,TEM1,1. ,290. ) PATCH(WAND3 ,LWALL , 1, 1, 11, 18, 6, 6, 1, 1) COVAL(WAND3 ,TEM1,1. ,290. ) PATCH(WAND4 ,NWALL , 1, 1, 10, 10, 1, 5, 1, 1) COVAL(WAND4 ,TEM1,1. ,290. ) PATCH(CHEM ,VOLUME, 1, 1, 1, 18, 1, 26, 1, 1) COVAL(CHEM ,S125, GRND1 , GRND1 ) COVAL(CHEM ,S227, GRND1 , GRND1 ) COVAL(CHEM ,S80 , GRND1 , GRND1 ) COVAL(CHEM ,S174, GRND1 , GRND1 ) COVAL(CHEM ,S116, GRND1 , GRND1 ) COVAL(CHEM ,TEM1, GRND1 , GRND1 ) PATCH(SURF1 ,HIGH , 1, 1, 1, 12, 19, 19, 1, 1) COVAL(SURF1 ,P1 ,1. , GRND1 ) COVAL(SURF1 ,S125, FIXFLU , GRND1 ) COVAL(SURF1 ,S227, FIXFLU , GRND1 ) COVAL(SURF1 ,S80 , FIXFLU , GRND1 ) COVAL(SURF1 ,S174, FIXFLU , GRND1 ) COVAL(SURF1 ,S116, FIXFLU , GRND1 ) COVAL(SURF1 ,TEM1, FIXFLU , GRND1 ) PATCH(RELT ,PHASEM, 1, 1, 1, 18, 1, 26, 1, 1) COVAL(RELT ,S125, GRND1 , SAME ) COVAL(RELT ,S227, GRND1 , SAME ) COVAL(RELT ,S80 , GRND1 , SAME ) COVAL(RELT ,S174, GRND1 , SAME ) COVAL(RELT ,S116, GRND1 , SAME ) PATCH(@RI001 ,LOW , 1, 1, 1, 10, 1, 1, 1, 1) COVAL(@RI001 ,EMIS,111. ,290. ) COVAL(@RI001 ,TEM1,0. ,290. ) PATCH(@RI002 ,NORTH , 1, 1, 10, 10, 1, 5, 1, 1) COVAL(@RI002 ,EMIS,111. ,290. ) COVAL(@RI002 ,TEM1,0. ,290. ) PATCH(@RI003 ,SOUTH , 1, 1, 11, 11, 6, 7, 1, 1) COVAL(@RI003 ,EMIS,111. ,300. ) COVAL(@RI003 ,TEM1, GRND1 , GRND1 ) PATCH(@RI004 ,HIGH , 1, 1, 11, 11, 7, 7, 1, 1) COVAL(@RI004 ,EMIS,111. ,300. ) COVAL(@RI004 ,TEM1, GRND1 , GRND1 ) PATCH(@RI005 ,NORTH , 1, 1, 11, 11, 6, 7, 1, 1) COVAL(@RI005 ,EMIS,111. ,300. ) COVAL(@RI005 ,TEM1, GRND1 , GRND1 ) PATCH(@RI006 ,LOW , 1, 1, 12, 18, 6, 6, 1, 1) COVAL(@RI006 ,EMIS,111. ,290. ) COVAL(@RI006 ,TEM1,0. ,290. ) PATCH(@RI007 ,NORTH , 1, 1, 18, 18, 6, 26, 1, 1) COVAL(@RI007 ,EMIS,111. ,290. ) COVAL(@RI007 ,TEM1,0. ,290. ) PATCH(@RI008 ,HIGH , 1, 1, 15, 18, 26, 26, 1, 1) COVAL(@RI008 ,EMIS,111. ,290. ) COVAL(@RI008 ,TEM1,0. ,290. ) PATCH(@RI009 ,SOUTH , 1, 1, 15, 15, 21, 26, 1, 1) COVAL(@RI009 ,EMIS,111. ,290. ) COVAL(@RI009 ,TEM1,0. ,290. ) PATCH(@RI010 ,HIGH , 1, 1, 13, 14, 20, 20, 1, 1) COVAL(@RI010 ,EMIS,111. ,0. ) COVAL(@RI010 ,TEM1,0. ,290. ) PATCH(@RI011 ,NORTH , 1, 1, 12, 12, 20, 20, 1, 1) COVAL(@RI011 ,EMIS,111. ,900. ) COVAL(@RI011 ,TEM1, GRND1 , GRND1 ) PATCH(@RI012 ,LOW , 1, 1, 1, 12, 20, 20, 1, 1) COVAL(@RI012 ,EMIS,111. ,900. ) COVAL(@RI012 ,TEM1, GRND1 , GRND1 ) XCYCLE = F EGWF = T WALLCO = GRND2 ************************************************************ Group 14. Downstream Pressure For PARAB ************************************************************ Group 15. Terminate Sweeps LSWEEP = 100 ;ISWC1 = 1 LITHYD = 1 ;LITFLX = 1 ;LITC = 1 ;ITHC1 = 1 SELREF = T RESFAC =1.0E-03 ************************************************************ Group 16. Terminate Iterations LITER(P1)=20 ;LITER(V1)=10 LITER(W1)=10 ;LITER(S125)=200 LITER(S227)=200 ;LITER(S80)=200 LITER(S174)=200 ;LITER(S116)=200 LITER(TEM1)=20 ENDIT(P1)=1.0E-03 ;ENDIT(V1)=1.0E-03 ENDIT(W1)=1.0E-03 ;ENDIT(S125)=1.0E-03 ENDIT(S227)=1.0E-03 ;ENDIT(S80)=1.0E-03 ENDIT(S174)=1.0E-03 ;ENDIT(S116)=1.0E-03 ENDIT(TEM1)=1.0E-03 ************************************************************ Group 17. Relaxation RELAX(P1,LINRLX,1.) RELAX(V1,FALSDT,0.02) RELAX(W1,FALSDT,0.02) RELAX(S226,LINRLX,1.) RELAX(S125,FALSDT,1000.) RELAX(S227,FALSDT,1000.) RELAX(S80,FALSDT,1000.) RELAX(S174,FALSDT,1000.) RELAX(S116,FALSDT,1000.) RELAX(ENUL,LINRLX,1.) RELAX(BLOK,LINRLX,1.) RELAX(PRPS,LINRLX,1.) RELAX(DEPO,LINRLX,1.) RELAX(SPHT,LINRLX,1.) RELAX(CNDT,LINRLX,1.) RELAX(EMIS,LINRLX,1.) RELAX(RHO1,LINRLX,1.) RELAX(TEM1,LINRLX,0.7) OVRRLX =0. EXPERT = F ;NNORSL = F ************************************************************ Group 18. Limits VARMAX(P1)=1.0E+10 ;VARMIN(P1)=-1.0E+10 VARMAX(V1)=1.0E+06 ;VARMIN(V1)=-1.0E+06 VARMAX(W1)=1.0E+06 ;VARMIN(W1)=-1.0E+06 VARMAX(S226)=1. ;VARMIN(S226)=1.0E-20 VARMAX(S125)=1. ;VARMIN(S125)=1.0E-20 VARMAX(S227)=1. ;VARMIN(S227)=1.0E-20 VARMAX(S80)=1. ;VARMIN(S80)=1.0E-20 VARMAX(S174)=1. ;VARMIN(S174)=1.0E-20 VARMAX(S116)=1. ;VARMIN(S116)=1.0E-20 VARMAX(ENUL)=1.0E+10 ;VARMIN(ENUL)=-1.0E+10 VARMAX(BLOK)=1.0E+10 ;VARMIN(BLOK)=-1.0E+10 VARMAX(PRPS)=1.0E+10 ;VARMIN(PRPS)=-1.0E+10 VARMAX(DEPO)=1.0E+10 ;VARMIN(DEPO)=-1.0E+10 VARMAX(SPHT)=1.0E+10 ;VARMIN(SPHT)=-1.0E+10 VARMAX(CNDT)=1.0E+10 ;VARMIN(CNDT)=-1.0E+10 VARMAX(EMIS)=1.0E+10 ;VARMIN(EMIS)=-1.0E+10 VARMAX(RHO1)=1.0E+10 ;VARMIN(RHO1)=-1.0E+10 VARMAX(TEM1)=2000. ;VARMIN(TEM1)=200. ************************************************************ Group 19. Data transmitted to GROUND NAMGRD =CVD S2SR = T PARSOL = F ISG62 = 1 CSG10 ='q1' SPEDAT(SET,DOMAIN,PHASE_1_MAT,I,70) SPEDAT(SET,DOMAIN,PROPS_FILE_1,C,Q1) SPEDAT(SET,CVD,MCDOPT,I,2) SPEDAT(SET,CVD,BINOPT,I,4) SPEDAT(SET,CVD,MCPROP,I,3) SPEDAT(SET,CVD,CHMRLX,R,0.9) SPEDAT(SET,CVD,NGREAC,I,1) SPEDAT(SET,CVD,GREAC(1),I,75) SPEDAT(SET,CVD,NSREAC,I,3) SPEDAT(SET,CVD,SREAC(1),I,76) SPEDAT(SET,CVD,SREAC(2),I,77) SPEDAT(SET,CVD,SREAC(3),I,78) SPEDAT(SET,CVD,RADCVD,L,T) SPEDAT(SET,GXMONI,PLOTALL,L,T) SPEDAT(SET,MATERIAL,111,L,T) SPEDAT(SET,MATERIAL,198,L,T) ************************************************************ Group 20. Preliminary Printout ************************************************************ Group 21. Print-out of Variables INIFLD = F ;SUBWGR = F * Y in OUTPUT argument list denotes: * 1-field 2-correction-eq. monitor 3-selective dumping * 4-whole-field residual 5-spot-value table 6-residual table OUTPUT(P1,Y,N,Y,Y,Y,Y) OUTPUT(V1,Y,N,Y,Y,Y,Y) OUTPUT(W1,Y,N,Y,Y,Y,Y) OUTPUT(S226,Y,N,Y,N,N,N) OUTPUT(S125,Y,N,Y,Y,Y,Y) OUTPUT(S227,Y,N,Y,Y,Y,Y) OUTPUT(S80,Y,N,Y,Y,Y,Y) OUTPUT(S174,Y,N,Y,Y,Y,Y) OUTPUT(S116,Y,N,Y,Y,Y,Y) OUTPUT(ENUL,Y,N,Y,N,N,N) OUTPUT(BLOK,Y,N,Y,N,N,N) OUTPUT(PRPS,Y,N,Y,N,N,N) OUTPUT(DEPO,Y,N,Y,N,N,N) OUTPUT(SPHT,Y,N,Y,N,N,N) OUTPUT(CNDT,Y,N,Y,N,N,N) OUTPUT(EMIS,Y,N,Y,N,N,N) OUTPUT(RHO1,Y,N,Y,N,N,N) OUTPUT(TEM1,Y,N,Y,Y,Y,Y) ************************************************************ Group 22. Monitor Print-Out IXMON = 1 ;IYMON = 5 ;IZMON = 12 NPRMON = 100000 ;NPRMNT = 1 ;TSTSWP = -1 UWATCH = T ;USTEER = T HIGHLO = F ************************************************************ Group 23.Field Print-Out & Plot Control NPRINT = 100000 ;NUMCLS = 5 NYPRIN = -1 ;IYPRF = 1 ;IYPRL = 10000 NZPRIN = -1 ;IZPRF = 1 ;IZPRL = 10000 XZPR = F ;YZPR = F IPLTF = 1 ;IPLTL = -1 ;NPLT = -1 ISWPRF = 1 ;ISWPRL = 100000 ITABL = 3 ;IPROF = 1 ABSIZ =0.5 ;ORSIZ =0.4 NTZPRF = 1 ;NCOLPF = 50 ICHR = 2 ;NCOLCO = 45 ;NROWCO = 20 No PATCHes yet used for this Group ************************************************************ Group 24. Dumps For Restarts SAVE = T ;NOWIPE = F NSAVE =CHAM STOP