TALK=T;RUN(1,1)
DISPLAY
This q1 file simulates an ASM single wafer chemical vapour
deposition reactor using Wilke diffusion; the reactor is
axisymmetric and the geometry was provided by TU Delft.
Laminar, steady-state flow is assumed.
------> Y
|
|
| Z
V
| INLET FLOW |**********************|
C| PLUG PROFILE |**********************|
E|||||||||||||||||||||||**********************|
N|VVVVVVVVVVVVVVVVVVVVV|***** BLOCKAGE *******|W
T| |**********************|A
R| | |**********************|L
E| V | ___________________|L
| |**| |
L| |**| |
I| | |**| |
N| V |**| |
E| |__| |
| |
| | |W
C| V |A
E| --> --> | |L
N| V |L
T| |
R| |
E|___________________________ |
|****** SUSCEPTOR **********| | |
L|***************************|_______ V |
I|***********************************| |
N|***********************************| |W
E|***********************************| |A
|***********************************| | |L
|************ BLOCKAGE *************| V |L
|***********************************| |
|***********************************| |
|***********************************| |
|***********************************|PRESSURE|
|***********************************| OUTLET |
ENDDIS
************************************************************
Group 1. Run Title and Number
************************************************************
************************************************************
TEXT(ASM Single Wafer Si Reactor - Wilke:D100)
************************************************************
************************************************************
IRUNN = 1 ;LIBREF = 14
************************************************************
Group 2. Time dependence
STEADY = T
************************************************************
Group 3. X-Direction Grid Spacing
CARTES = F
NX = 1
XULAST =1.0E-02
XFRAC(1)=1.
************************************************************
Group 4. Y-Direction Grid Spacing
NY = 18
YVLAST =0.21
YFRAC(1)=0.047619 ;YFRAC(2)=0.095238
YFRAC(3)=0.142857 ;YFRAC(4)=0.190476
YFRAC(5)=0.238095 ;YFRAC(6)=0.285714
YFRAC(7)=0.333333 ;YFRAC(8)=0.380952
YFRAC(9)=0.428571 ;YFRAC(10)=0.47619
YFRAC(11)=0.5 ;YFRAC(12)=0.571429
YFRAC(13)=0.654762 ;YFRAC(14)=0.738095
YFRAC(15)=0.803571 ;YFRAC(16)=0.869048
YFRAC(17)=0.934524 ;YFRAC(18)=1.
************************************************************
Group 5. Z-Direction Grid Spacing
PARAB = F
NZ = 26
ZWLAST =0.34
ZFRAC(1)=0.058824 ;ZFRAC(2)=0.117647
ZFRAC(3)=0.176471 ;ZFRAC(4)=0.235294
ZFRAC(5)=0.294118 ;ZFRAC(6)=0.352941
ZFRAC(7)=0.411765 ;ZFRAC(8)=0.439468
ZFRAC(9)=0.466671 ;ZFRAC(10)=0.493335
ZFRAC(11)=0.519411 ;ZFRAC(12)=0.544843
ZFRAC(13)=0.569555 ;ZFRAC(14)=0.593455
ZFRAC(15)=0.616411 ;ZFRAC(16)=0.638238
ZFRAC(17)=0.658633 ;ZFRAC(18)=0.677011
ZFRAC(19)=0.691176 ;ZFRAC(20)=0.705882
ZFRAC(21)=0.750392 ;ZFRAC(22)=0.795808
ZFRAC(23)=0.842386 ;ZFRAC(24)=0.890576
ZFRAC(25)=0.941361 ;ZFRAC(26)=1.
************************************************************
Group 6. Body-Fitted Coordinates
************************************************************
Group 7. Variables: STOREd,SOLVEd,NAMEd
ONEPHS = T
NAME(1)=P1 ;NAME(5)=V1
NAME(7)=W1 ;NAME(16)=S116
NAME(17)=S140 ;NAME(18)=S142
NAME(19)=S145 ;NAME(20)=S158
NAME(21)=S147 ;NAME(22)=S80
NAME(141)=ENUL ;NAME(142)=BLOK
NAME(143)=PRPS ;NAME(144)=DEPO
NAME(145)=SPHT ;NAME(146)=CNDT
NAME(147)=EMIS ;NAME(149)=RHO1
NAME(150)=TEM1
* Y in SOLUTN argument list denotes:
* 1-stored 2-solved 3-whole-field
* 4-point-by-point 5-explicit 6-harmonic averaging
SOLUTN(P1,Y,Y,Y,N,N,N)
SOLUTN(V1,Y,Y,N,N,N,Y)
SOLUTN(W1,Y,Y,N,N,N,Y)
SOLUTN(S116,Y,N,N,N,N,Y)
SOLUTN(S140,Y,Y,Y,N,N,Y)
SOLUTN(S142,Y,Y,Y,N,N,Y)
SOLUTN(S145,Y,Y,Y,N,N,Y)
SOLUTN(S158,Y,Y,Y,N,N,Y)
SOLUTN(S147,Y,Y,Y,N,N,Y)
SOLUTN(S80,Y,Y,Y,N,N,Y)
SOLUTN(ENUL,Y,N,N,N,N,Y)
SOLUTN(BLOK,Y,N,N,N,N,Y)
SOLUTN(PRPS,Y,N,N,N,N,Y)
SOLUTN(DEPO,Y,N,N,N,N,Y)
SOLUTN(SPHT,Y,N,N,N,N,Y)
SOLUTN(CNDT,Y,N,N,N,N,Y)
SOLUTN(EMIS,Y,N,N,N,N,Y)
SOLUTN(RHO1,Y,N,N,N,N,Y)
SOLUTN(TEM1,Y,Y,Y,N,N,Y)
DEN1 = 149
VISL = 141
IVARBK = -1 ;ISOLBK = 1
PRNITS= F ;OPTRLX= F ;NOSIP= F ;ALLVBC= F
DBSOLV= F ;IMPINI= F ;EARL1D= F
PRPS = 143
************************************************************
Group 8. Terms & Devices
* Y in TERMS argument list denotes:
* 1-built-in source 2-convection 3-diffusion 4-transient
* 5-first phase variable 6-interphase transport
TERMS(P1,Y,Y,Y,N,Y,Y)
TERMS(V1,Y,Y,Y,Y,Y,Y)
TERMS(W1,Y,Y,Y,Y,Y,Y)
TERMS(S140,N,Y,Y,Y,N,Y)
TERMS(S142,N,Y,Y,Y,Y,Y)
TERMS(S145,N,Y,Y,Y,N,Y)
TERMS(S158,N,Y,Y,Y,Y,Y)
TERMS(S147,N,Y,Y,Y,N,Y)
TERMS(S80,N,Y,Y,Y,Y,Y)
TERMS(TEM1,N,Y,Y,Y,Y,Y)
DIFCUT =0. ;ZDIFAC =1.
GALA = F ;ADDDIF = F
UDIFNE = T
USOURC = T
ISOLX = 0 ;ISOLY = 0 ;ISOLZ = 0
************************************************************
Group 9. Properties used if PRPS is not
stored, and where PRPS = -1.0 if it is!
RHO1 =1. ;TMP1 =0. ;EL1 =0.
TSURR =0. ;TEMP0 =0. ;PRESS0 =133.
DVO1DT =0. ;DRH1DP =0.
TMP1A =0.
EMISS =0. ;SCATT =0.
RADIA =0. ;RADIB =0.
ENUL =1.0E-05 ;ENUT =0.
PRNDTL(V1)=1. ;PRNDTL(W1)=1.
PRNDTL(S140)=-GRND8 ;PRNDTL(S142)=-GRND8
PRNDTL(S145)=-GRND8 ;PRNDTL(S158)=-GRND8
PRNDTL(S147)=-GRND8 ;PRNDTL(S80)=-GRND8
PRNDTL(TEM1)=1.
PRT(V1)=1. ;PRT(W1)=1.
PRT(S140)=1. ;PRT(S142)=1.
PRT(S145)=1. ;PRT(S158)=1.
PRT(S147)=1. ;PRT(S80)=1.
PRT(TEM1)=1.
CP1 =1. ;CP2 =1.
* List of user-defined materials to be read by EARTH
MATFLG=T;IMAT=1
* Name
*Ind. Dens. Viscos. Spec.heat Conduct. Expans. Compr.
*
70 GRND8 GRND8 GRND8 GRND8 1.000
* constants for GRND option no 1
0.0 0.0 0.0
* constants for GRND option no 2
0.0 0.0 0.0
* constants for GRND option no 3
0.0 0.0 0.0
* constants for GRND option no 4
0.0 0.0 0.0
************************************************************
Group 10.Inter-Phase Transfer Processes
************************************************************
Group 11.Initial field variables (PHIs)
FIINIT(P1)=0. ;FIINIT(V1)=0.
FIINIT(W1)=0. ;FIINIT(S116)=0.887
FIINIT(S140)=0.113 ;FIINIT(S142)=1.0E-10
FIINIT(S145)=1.0E-10 ;FIINIT(S158)=1.0E-10
FIINIT(S147)=1.0E-10 ;FIINIT(S80)=1.0E-10
FIINIT(ENUL)=1.0E-10 ;FIINIT(BLOK)=1.
FIINIT(PRPS)=70. ;FIINIT(DEPO)=1.0E-10
FIINIT(SPHT)=1.0E-10 ;FIINIT(CNDT)=1.0E-10
FIINIT(EMIS)=0. ;FIINIT(RHO1)=1.0E-10
FIINIT(TEM1)=290.
PATCH(WAL1 ,INIVAL, 1, 1, 1, 12, 20, 20, 1, 1)
INIT(WAL1 ,BLOK,0. ,2. )
INIT(WAL1 ,PRPS,0. ,111. )
PATCH(WAL2 ,INIVAL, 1, 1, 11, 18, 1, 5, 1, 1)
INIT(WAL2 ,PRPS,0. ,198. )
PATCH(WAL3 ,INIVAL, 1, 1, 11, 11, 6, 7, 1, 1)
INIT(WAL3 ,BLOK,0. ,4. )
INIT(WAL3 ,PRPS,0. ,111. )
PATCH(WAL4 ,INIVAL, 1, 1, 1, 14, 21, 26, 1, 1)
INIT(WAL4 ,PRPS,0. ,198. )
INIADD = F
FSWEEP = 1
NAMFI =CHAM
************************************************************
Group 12. Patchwise adjustment of terms
Patches for this group are printed with those
for Group 13.
Their names begin either with GP12 or &
************************************************************
Group 13. Boundary & Special Sources
PATCH(INLET ,LOW , 1, 1, 1, 10, 1, 1, 1, 1)
COVAL(INLET ,P1 , FIXFLU ,2.11434E-03 )
COVAL(INLET ,V1 ,0. ,0. )
COVAL(INLET ,W1 ,0. ,1.345 )
COVAL(INLET ,S116,0. ,0.887 )
COVAL(INLET ,S140,0. ,0.113 )
COVAL(INLET ,S142,0. ,0. )
COVAL(INLET ,S145,0. ,0. )
COVAL(INLET ,S158,0. ,0. )
COVAL(INLET ,S147,0. ,0. )
COVAL(INLET ,S80 ,0. ,0. )
COVAL(INLET ,TEM1,0. ,290. )
PATCH(OUT ,HIGH , 1, 1, 15, 18, 26, 26, 1, 1)
COVAL(OUT ,P1 ,1000. ,0. )
COVAL(OUT ,V1 ,0. , SAME )
COVAL(OUT ,W1 ,0. , SAME )
COVAL(OUT ,S116,0. , SAME )
COVAL(OUT ,S140,0. , SAME )
COVAL(OUT ,S142,0. , SAME )
COVAL(OUT ,S145,0. , SAME )
COVAL(OUT ,S158,0. , SAME )
COVAL(OUT ,S147,0. , SAME )
COVAL(OUT ,S80 ,0. , SAME )
COVAL(OUT ,TEM1,0. , SAME )
PATCH(WAFER ,CELL , 1, 1, 1, 12, 20, 20, 1, 1)
COVAL(WAFER ,TEM1, FIXVAL ,900. )
PATCH(DOME ,HWALL , 1, 1, 13, 14, 20, 20, 1, 1)
COVAL(DOME ,TEM1,1. ,290. )
PATCH(WAND1 ,SWALL , 1, 1, 15, 15, 21, 26, 1, 1)
COVAL(WAND1 ,TEM1,1. ,290. )
PATCH(WAND2 ,NWALL , 1, 1, 18, 18, 6, 26, 1, 1)
COVAL(WAND2 ,W1 ,1. ,0. )
COVAL(WAND2 ,TEM1,1. ,290. )
PATCH(WAND3 ,LWALL , 1, 1, 11, 18, 6, 6, 1, 1)
COVAL(WAND3 ,TEM1,1. ,290. )
PATCH(WAND4 ,NWALL , 1, 1, 10, 10, 1, 5, 1, 1)
COVAL(WAND4 ,TEM1,1. ,290. )
PATCH(CHEM ,VOLUME, 1, 1, 1, 18, 1, 26, 1, 1)
COVAL(CHEM ,S140, GRND1 , GRND1 )
COVAL(CHEM ,S142, GRND1 , GRND1 )
COVAL(CHEM ,S145, GRND1 , GRND1 )
COVAL(CHEM ,S158, GRND1 , GRND1 )
COVAL(CHEM ,S147, GRND1 , GRND1 )
COVAL(CHEM ,S80 , GRND1 , GRND1 )
COVAL(CHEM ,TEM1, GRND1 , GRND1 )
PATCH(SURF1 ,HIGH , 1, 1, 1, 12, 19, 19, 1, 1)
COVAL(SURF1 ,P1 ,1. , GRND1 )
COVAL(SURF1 ,S140, FIXFLU , GRND1 )
COVAL(SURF1 ,S142, FIXFLU , GRND1 )
COVAL(SURF1 ,S145, FIXFLU , GRND1 )
COVAL(SURF1 ,S158, FIXFLU , GRND1 )
COVAL(SURF1 ,S147, FIXFLU , GRND1 )
COVAL(SURF1 ,S80 , FIXFLU , GRND1 )
COVAL(SURF1 ,TEM1, FIXFLU , GRND1 )
PATCH(RELT ,PHASEM, 1, 1, 1, 18, 1, 26, 1, 1)
COVAL(RELT ,S140, GRND1 , SAME )
COVAL(RELT ,S142, GRND1 , SAME )
COVAL(RELT ,S145, GRND1 , SAME )
COVAL(RELT ,S158, GRND1 , SAME )
COVAL(RELT ,S147, GRND1 , SAME )
COVAL(RELT ,S80 , GRND1 , SAME )
PATCH(@RI001 ,LOW , 1, 1, 1, 10, 1, 1, 1, 1)
COVAL(@RI001 ,EMIS,111. ,290. )
COVAL(@RI001 ,TEM1,0. ,290. )
PATCH(@RI002 ,NORTH , 1, 1, 10, 10, 1, 5, 1, 1)
COVAL(@RI002 ,EMIS,111. ,290. )
COVAL(@RI002 ,TEM1,0. ,290. )
PATCH(@RI003 ,SOUTH , 1, 1, 11, 11, 6, 7, 1, 1)
COVAL(@RI003 ,EMIS,111. ,300. )
COVAL(@RI003 ,TEM1, GRND1 , GRND1 )
PATCH(@RI004 ,HIGH , 1, 1, 11, 11, 7, 7, 1, 1)
COVAL(@RI004 ,EMIS,111. ,300. )
COVAL(@RI004 ,TEM1, GRND1 , GRND1 )
PATCH(@RI005 ,NORTH , 1, 1, 11, 11, 6, 7, 1, 1)
COVAL(@RI005 ,EMIS,111. ,300. )
COVAL(@RI005 ,TEM1, GRND1 , GRND1 )
PATCH(@RI006 ,LOW , 1, 1, 12, 18, 6, 6, 1, 1)
COVAL(@RI006 ,EMIS,111. ,290. )
COVAL(@RI006 ,TEM1,0. ,290. )
PATCH(@RI007 ,NORTH , 1, 1, 18, 18, 6, 26, 1, 1)
COVAL(@RI007 ,EMIS,111. ,290. )
COVAL(@RI007 ,TEM1,0. ,290. )
PATCH(@RI008 ,HIGH , 1, 1, 15, 18, 26, 26, 1, 1)
COVAL(@RI008 ,EMIS,111. ,290. )
COVAL(@RI008 ,TEM1,0. ,290. )
PATCH(@RI009 ,SOUTH , 1, 1, 15, 15, 21, 26, 1, 1)
COVAL(@RI009 ,EMIS,111. ,290. )
COVAL(@RI009 ,TEM1,0. ,290. )
PATCH(@RI010 ,HIGH , 1, 1, 13, 14, 20, 20, 1, 1)
COVAL(@RI010 ,EMIS,111. ,290. )
COVAL(@RI010 ,TEM1,0. ,290. )
PATCH(@RI011 ,NORTH , 1, 1, 12, 12, 20, 20, 1, 1)
COVAL(@RI011 ,EMIS,111. ,900. )
COVAL(@RI011 ,TEM1, GRND1 , GRND1 )
PATCH(@RI012 ,LOW , 1, 1, 1, 12, 20, 20, 1, 1)
COVAL(@RI012 ,EMIS,111. ,900. )
COVAL(@RI012 ,TEM1, GRND1 , GRND1 )
XCYCLE = F
EGWF = T
WALLCO = GRND2
************************************************************
Group 14. Downstream Pressure For PARAB
************************************************************
Group 15. Terminate Sweeps
LSWEEP = 100 ;ISWC1 = 1
LITHYD = 1 ;LITFLX = 1 ;LITC = 1 ;ITHC1 = 1
SELREF = T
RESFAC =1.0E-03
************************************************************
Group 16. Terminate Iterations
LITER(P1)=20 ;LITER(V1)=10
LITER(W1)=10 ;LITER(S140)=20
LITER(S142)=20 ;LITER(S145)=20
LITER(S158)=20 ;LITER(S147)=20
LITER(S80)=20 ;LITER(TEM1)=20
ENDIT(P1)=1.0E-03 ;ENDIT(V1)=1.0E-03
ENDIT(W1)=1.0E-03 ;ENDIT(S140)=1.0E-03
ENDIT(S142)=1.0E-03 ;ENDIT(S145)=1.0E-03
ENDIT(S158)=1.0E-03 ;ENDIT(S147)=1.0E-03
ENDIT(S80)=1.0E-03 ;ENDIT(TEM1)=1.0E-03
************************************************************
Group 17. Relaxation
RELAX(P1,LINRLX,0.8)
RELAX(V1,FALSDT,2.0E-03)
RELAX(W1,FALSDT,2.0E-03)
RELAX(S116,LINRLX,1.)
RELAX(S140,FALSDT,1.)
RELAX(S142,FALSDT,1.)
RELAX(S145,FALSDT,1.)
RELAX(S158,FALSDT,1.)
RELAX(S147,FALSDT,1.)
RELAX(S80,FALSDT,1.)
RELAX(ENUL,LINRLX,1.)
RELAX(BLOK,LINRLX,1.)
RELAX(PRPS,LINRLX,1.)
RELAX(DEPO,LINRLX,1.)
RELAX(SPHT,LINRLX,1.)
RELAX(CNDT,LINRLX,1.)
RELAX(EMIS,LINRLX,1.)
RELAX(RHO1,LINRLX,1.)
RELAX(TEM1,LINRLX,0.3)
OVRRLX =0.
EXPERT = F ;NNORSL = F
************************************************************
Group 18. Limits
VARMAX(P1)=1.0E+10 ;VARMIN(P1)=-1.0E+10
VARMAX(V1)=1.0E+06 ;VARMIN(V1)=-1.0E+06
VARMAX(W1)=1.0E+06 ;VARMIN(W1)=-1.0E+06
VARMAX(S116)=1. ;VARMIN(S116)=1.0E-20
VARMAX(S140)=1. ;VARMIN(S140)=1.0E-20
VARMAX(S142)=1. ;VARMIN(S142)=1.0E-20
VARMAX(S145)=1. ;VARMIN(S145)=1.0E-20
VARMAX(S158)=1. ;VARMIN(S158)=1.0E-20
VARMAX(S147)=1. ;VARMIN(S147)=1.0E-20
VARMAX(S80)=1. ;VARMIN(S80)=1.0E-20
VARMAX(ENUL)=1.0E+10 ;VARMIN(ENUL)=-1.0E+10
VARMAX(BLOK)=1.0E+10 ;VARMIN(BLOK)=-1.0E+10
VARMAX(PRPS)=1.0E+10 ;VARMIN(PRPS)=-1.0E+10
VARMAX(DEPO)=1.0E+10 ;VARMIN(DEPO)=-1.0E+10
VARMAX(SPHT)=1.0E+10 ;VARMIN(SPHT)=-1.0E+10
VARMAX(CNDT)=1.0E+10 ;VARMIN(CNDT)=-1.0E+10
VARMAX(EMIS)=1.0E+10 ;VARMIN(EMIS)=-1.0E+10
VARMAX(RHO1)=1.0E+10 ;VARMIN(RHO1)=-1.0E+10
VARMAX(TEM1)=2000. ;VARMIN(TEM1)=200.
************************************************************
Group 19. Data transmitted to GROUND
NAMGRD =CVD
S2SR = T
PARSOL = F
ISG62 = 1
CSG10 ='q1'
SPEDAT(SET,CVD,MCDOPT,I,2)
SPEDAT(SET,CVD,BINOPT,I,4)
SPEDAT(SET,CVD,MCPROP,I,3)
SPEDAT(SET,CVD,CHMRLX,R,0.5)
SPEDAT(SET,CVD,NGREAC,I,5)
SPEDAT(SET,CVD,GREAC(1),I,6)
SPEDAT(SET,CVD,GREAC(2),I,7)
SPEDAT(SET,CVD,GREAC(3),I,16)
SPEDAT(SET,CVD,GREAC(4),I,9)
SPEDAT(SET,CVD,GREAC(5),I,10)
SPEDAT(SET,CVD,NSREAC,I,5)
SPEDAT(SET,CVD,SREAC(1),I,11)
SPEDAT(SET,CVD,SREAC(2),I,12)
SPEDAT(SET,CVD,SREAC(3),I,13)
SPEDAT(SET,CVD,SREAC(4),I,14)
SPEDAT(SET,CVD,SREAC(5),I,15)
SPEDAT(SET,CVD,RADCVD,L,T)
SPEDAT(SET,GXMONI,PLOTALL,L,T)
SPEDAT(SET,MATERIAL,70,L,T)
SPEDAT(SET,MATERIAL,111,L,T)
SPEDAT(SET,MATERIAL,198,L,T)
************************************************************
Group 20. Preliminary Printout
************************************************************
Group 21. Print-out of Variables
INIFLD = F ;SUBWGR = F
* Y in OUTPUT argument list denotes:
* 1-field 2-correction-eq. monitor 3-selective dumping
* 4-whole-field residual 5-spot-value table 6-residual table
OUTPUT(P1,Y,N,Y,Y,Y,Y)
OUTPUT(V1,Y,N,Y,Y,Y,Y)
OUTPUT(W1,Y,N,Y,Y,Y,Y)
OUTPUT(S116,Y,N,Y,N,N,N)
OUTPUT(S140,Y,N,Y,Y,Y,Y)
OUTPUT(S142,Y,N,Y,Y,Y,Y)
OUTPUT(S145,Y,N,Y,Y,Y,Y)
OUTPUT(S158,Y,N,Y,Y,Y,Y)
OUTPUT(S147,Y,N,Y,Y,Y,Y)
OUTPUT(S80,Y,N,Y,Y,Y,Y)
OUTPUT(ENUL,Y,N,Y,N,N,N)
OUTPUT(BLOK,Y,N,Y,N,N,N)
OUTPUT(PRPS,Y,N,Y,N,N,N)
OUTPUT(DEPO,Y,N,Y,N,N,N)
OUTPUT(SPHT,Y,N,Y,N,N,N)
OUTPUT(CNDT,Y,N,Y,N,N,N)
OUTPUT(EMIS,Y,N,Y,N,N,N)
OUTPUT(RHO1,Y,N,Y,N,N,N)
OUTPUT(TEM1,Y,N,Y,Y,Y,Y)
************************************************************
Group 22. Monitor Print-Out
IXMON = 1 ;IYMON = 5 ;IZMON = 12
NPRMON = 100000 ;NPRMNT = 1 ;TSTSWP = -1
UWATCH = T ;USTEER = T
HIGHLO = F
************************************************************
Group 23.Field Print-Out & Plot Control
NPRINT = 100000 ;NUMCLS = 5
NYPRIN = -1 ;IYPRF = 1 ;IYPRL = 10000
NZPRIN = -1 ;IZPRF = 1 ;IZPRL = 10000
XZPR = F ;YZPR = F
IPLTF = 1 ;IPLTL = -1 ;NPLT = -1
ISWPRF = 1 ;ISWPRL = 100000
ITABL = 3 ;IPROF = 1
ABSIZ =0.5 ;ORSIZ =0.4
NTZPRF = 1 ;NCOLPF = 50
ICHR = 2 ;NCOLCO = 45 ;NROWCO = 20
No PATCHes yet used for this Group
************************************************************
Group 24. Dumps For Restarts
SAVE = T ;NOWIPE = F
NSAVE =CHAM
STOP