LOAD(D100) GROUP 1. Run identifiers and other preliminaries. TEXT(ASM Single Wafer Si Reactor-Soret :D102 TITLE DISPLAY This q1 file simulates an ASM single wafer chemical vapour deposition reactor using Soret thermal diffusion and Wilke diffusion; the reactor is axisymmetric and the geometry was provided by TU Delft. Laminar, steady-state flow is assumed. ENDDIS ************************************************************ * * GROUP 19. Data communicated by SATELLITE to GROUND * ** SPEDAT used for passing options and additional information ** to GROUND. ** MCDOPT = 2 Wilke Multi-component Diffusion Law ** THMDIF = T Activate Soret Effect (Thermal Diffusion) ** THMOPT = 1 Option for thermal diffusion based on Clarke- ** Jones formulation using rigid spheres ** assumption ** THMFRQ = 3 Frequency of thermal diffusion calculation ** Calculation for first n sweeps, then every n ** sweeps ** THMRLX = 1.0 Relaxation factor for thermal diffusion ** calculation SPEDAT(SET,CVD,MCDOPT,I,2) SPEDAT(SET,CVD,THMDIF,L,T) SPEDAT(SET,CVD,THMOPT,I,1) SPEDAT(SET,CVD,THMFRQ,I,3) SPEDAT(SET,CVD,THMRLX,R,1.0)